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Semiconductor wafer having identification unit and method of identifying the semiconductor wafer using the identification unit

  • US 20050280503A1
  • Filed: 06/08/2005
  • Published: 12/22/2005
  • Est. Priority Date: 06/16/2004
  • Status: Abandoned Application
First Claim
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1. A semiconductor wafer, comprising:

  • a radio frequency identification (RFID) chip on one side of the semiconductor wafer, on which a pattern has been formed, wherein information on the wafer is input to and/or output from the RFID chip using radio frequency communication.

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