×

Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices

  • US 20050283697A1
  • Filed: 06/15/2005
  • Published: 12/22/2005
  • Est. Priority Date: 06/18/2004
  • Status: Active Grant
First Claim
Patent Images

1. A semiconductor test apparatus for simultaneously testing a plurality of semiconductor devices, comprising:

  • a plurality of pattern generation boards for receiving a test program from an external server, generating a test pattern signal and an expected signal, transmitting the test pattern signal to the semiconductor devices, receiving a test pattern result signal from the semiconductor devices, comparing the test pattern result signal with the expected signal, generating a Direct Current (DC) test signal and a DC test expected signal for a DC test, transmitting the DC test signal to the semiconductor devices, and receiving a DC test result signal from the semiconductor devices, comparing the DC test result signal with the DC test expected signal;

    a Device Under Test (DUT) board including a plurality of sockets for connection to the semiconductor devices and a plurality of connectors for connection to the pattern generation boards, the DUT board receiving the test pattern signal or the DC test signal from the pattern generation boards, transmitting the test pattern signal or DC test signal to the semiconductor devices, receiving the test pattern result signal or DC test result signal from the semiconductor devices, and transmitting the test pattern result signal or DC test result signal to the pattern generation boards;

    a backplane board including a plurality of connectors for connection to the plurality of pattern generation boards, the backplane board mechanically supporting the pattern generation boards, the backplane board including a communication interface unit for connection to the external server; and

    a power supply unit for mechanically supporting the backplane board and supplying power to the backplane board.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×