MEMS gyroscope with horizontally oriented drive electrodes
First Claim
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1. A MEMS actuator device, comprising:
- at least one substrate including one or more horizontal drive electrodes; and
a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes, said movable electrode adapted to oscillate back and forth horizontally along a motor drive axis of the actuator device.
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Abstract
Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present invention can include at least one substrate including one or more horizontal drive electrodes, and a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes. The horizontal drive electrodes and/or movable electrode can be configured to eliminate or reduce rate bias and scale factor errors resulting from the displacement of the movable electrode in the direction of a sense axis of the device.
32 Citations
70 Claims
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1. A MEMS actuator device, comprising:
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at least one substrate including one or more horizontal drive electrodes; and
a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes, said movable electrode adapted to oscillate back and forth horizontally along a motor drive axis of the actuator device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A MEMS actuator device, comprising:
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a lower substrate including at least one lower horizontal drive electrode;
an upper substrate including at least one upper horizontal drive electrode; and
a movable proof mass adapted to oscillate back and forth horizontally within an interior space of the upper and lower substrates vertically adjacent to the at least one lower and upper horizontal drive electrodes. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A MEMS actuator device, comprising;
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a set of vertically spaced horizontal drive electrodes; and
a movable proof mass adapted to oscillate back and forth horizontally in between the set of vertically spaced horizontal drive electrodes. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A MEMS actuator device, comprising:
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at least one substrate including one or more horizontal drive electrodes;
a proof mass adapted to oscillate back and forth horizontally in a space vertically adjacent each of the one or more horizontal drive electrodes; and
a motor drive voltage source for inducing a charge on each of the one or more horizontal drive electrodes.
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50. A MEMS gyroscope, comprising:
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at least one substrate including one or more horizontal drive electrodes;
a proof mass adapted to oscillate back and forth horizontally in a space vertically adjacent each of the one or more horizontal drive electrodes;
a motor drive voltage source for inducing a charge on each of the one or more horizontal drive electrodes; and
sensing means for sensing motion of the proof mass along a sense axis parallel to the at least one substrate. - View Dependent Claims (51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67)
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68. A method for reducing rate bias errors and/or scale factor errors in a MEMS gyroscope, comprising the steps of:
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providing a MEMS actuator device equipped with a set of vertically spaced horizontal drive electrodes, and a proof mass adapted to oscillate back and forth horizontally in between the set of vertically spaced horizontal drive electrodes;
applying a motor drive voltage to each set of vertically spaced horizontal drive electrodes; and
sensing motion of the proof mass along a sense axis of the device. - View Dependent Claims (69, 70)
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Specification