Low voltage microelectromechanical RF switch architecture

• US 20050285696A1
• Filed: 06/29/2004
• Published: 12/29/2005
• Est. Priority Date: 06/29/2004
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: McDaniel, Bart R., Glass, Kevin W.
• Granted Patent: US 7,233,776 B2
• Time in Patent Office: Days
• US Class Current: 333/101
• CPC Class Codes: H01H 47/325 by switching regulator
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a pulse generator to provide a low voltage source, a transformer coupled to the pulse generator to boost a voltage received from the pulse generator and a switch component coupled to the pulse generator. The switch component includes an actuation capacitor to store charge associated with the voltage received from the transformer.

Claims

1. A microelectromechanical (MEMS) switch comprising:

a pulse generator to provide a low voltage source;

a transformer, coupled to the pulse generator, to boost a voltage received from the pulse generator; and

a switch component, coupled to the pulse generator, having an actuation capacitor to store charge associated with the voltage received from the transformer.

2. The switch of claim 1 further comprising a rectifier coupled between the transformer and the switch component.

3. The switch of claim 2 wherein the rectifier is a diode that is the p-substrate on which the MEMS switch is fabricated.

4. The switch of claim 3 wherein the substrate is a doped material that enables the diode to have a high breakdown voltage.

5. The switch of claim 1 wherein the transformer has an air core from multilevel metallization.

6. The switch of claim 1 wherein the pulse generator receives a control signal to indicate whether an actuation or de-actuation voltage is to be applied to the switch component.

7. The switch of claim 6 wherein the pulse generator includes first and second multiplexers coupled to a primary side of the transformer.

8. The switch of claim 7 wherein the pulse generator is a digital pulsed wave modulator.

9. The switch of claim 7 wherein the pulse generator is a frequency variable generator.

10. The switch of claim 6 wherein the pulse generator is mounted on a separate integrated circuit from the transformer and the switch component.

11. A wireless communication system comprising:

a receiver to receive high voltage RF signals;

a transmitter to transmit the high voltage RF signals; and

a microelectromechanical (MEMS) switch, coupled to the receiver and the transmitter, having;

a pulse generator to provide a low voltage source;

a transformer, coupled to the pulse generator, to boost a voltage received from the pulse generator; and

a switch component, coupled to the pulse generator, having an actuation capacitor to store charge associated with the voltage received from the transformer.

12. The system of claim 11 wherein the MEMS switch further comprises a rectifier coupled between the transformer and the switch component.

13. The system of claim 11 wherein the pulse generator receives a control signal to indicate whether an actuation or de-actuation voltage is to be applied to the switch component.

14. The system of claim 13 wherein the pulse generator includes:

a first multiplexer coupled to an input component of a primary side of the transformer; and

a second multiplexer coupled to an output component of the primary side of the transformer.

15. The system of claim 14 wherein the pulse generator is a digital pulsed wave modulator.

16. The system of claim 14 wherein the pulse generator is a frequency variable generator.

17. A method comprising:

generating a low voltage pulse at a pulse generator;

generating a high voltage at a transformer proportional to the low voltage pulse;

storing a charge associated with the high voltage at an actuation capacitor; and

actuating an switch component once a sufficient magnitude of charge has been stored by the capacitor.

18. The method of claim 17 further comprising:

the pulse generator transitioning to ground; and

rectifying the current.

19. The method of claim 18 further comprising:

generating a second low voltage pulse at the pulse generator;

generating a second high voltage at the transformer; and

storing a charge associated with the second high voltage at the actuation capacitor, wherein the charge is added to the charge that was previously stored.

20. A wireless communication system comprising:

a receiver to receive high voltage RF signals;

a transmitter to transmit the high voltage RF signals;

a microelectromechanical (MEMS) switch, coupled to the receiver and the transmitter, having;

a pulse generator to provide a low voltage source;

a transformer, coupled to the pulse generator, to boost a voltage received from the pulse generator; and

a switch component, coupled to the pulse generator, having an actuation capacitor to store charge associated with the voltage received from the transformer; and

an omni directional antenna coupled to the MEMS switch.

21. The system of claim 20 wherein the MEMS switch further comprises a rectifier coupled between the transformer and the switch component.

22. The system of claim 20 wherein the pulse generator includes:

a first multiplexer coupled to an input component of a primary side of the transformer; and

a second multiplexer coupled to an output component of the primary side of the transformer.