Methods and apparatus for sealing a chamber

• US 20050285992A1
• Filed: 06/02/2005
• Published: 12/29/2005
• Est. Priority Date: 06/02/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kurita, Shinichi, White, John M., Sterling, William N., Tanase, Yoshiaki
• Granted Patent: US 8,206,075 B2
• Time in Patent Office: Days
• US Class Current: 349/58
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber

Abstract

In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.

Claims

1. A load lock chamber comprising:

a body having;

at least one sealing surface wall including a sealing surface, the sealing surface wall having an opening adjacent the sealing surface adapted to input or output a substrate; and

a plurality of side walls;

a top coupled to the body, wherein the top includes one or more openings that divide the top into a first portion and a second portion; and

one or more top sealing members adapted to cover each opening of the top, wherein each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top.

2. The load lock chamber of claim 1 wherein the load lock chamber further comprises a load lock door adapted to close and seal the opening in the sealing surface wall of the body.

3. The load lock chamber of claim 2 wherein:

the load lock door includes a sealing member adapted to contact and seal against the sealing surface of the sealing surface wall; and

the first portion of the top contacts the sealing surface wall.

4. The load lock chamber of claim 3 wherein the one or more top sealing members reduce movement of the first portion of the top and the sealing surface wall so as to reduce wear of the sealing member of the load lock door.

5. The load lock chamber of claim 3 wherein the load lock door is adapted to move with the sealing surface wall.

6. The load lock chamber of claim 1 wherein the one or more openings of the top include one or more slots formed within the top.

7. The load lock chamber of claim 1 wherein the top includes:

a frame; and

an insert positioned within the frame.

8. The load lock chamber of claim 7 wherein the frame comprises stainless steel and the insert comprises aluminum.

9. The load lock chamber of claim 7 wherein the one or more openings of the top are formed within the frame.

10. The load lock chamber of claim 1 further comprising:

a bottom coupled to the body, wherein the bottom includes one or more openings that divide the bottom into a first portion and a second portion; and

one or more bottom sealing members adapted to cover each opening of the bottom, wherein each bottom sealing member absorbs a movement of the first portion of the bottom relative to the second portion of the bottom.

11. The load lock chamber of claim 10 wherein the load lock chamber further comprises a load lock door adapted to close and seal the opening in the sealing surface wall of the body.

12. The load lock chamber of claim 11 wherein:

the load lock door includes a sealing member adapted to contact and seal against the sealing surface of the sealing surface wall; and

the first portion of the bottom contacts the sealing surface wall.

13. The load lock chamber of claim 12 wherein the one or more bottom sealing members reduce movement of the first portion of the bottom and the sealing surface wall so as to reduce wear of the sealing member of the load lock door.

14. The load lock chamber of claim 13 wherein the load lock door is adapted to move with the sealing surface wall.

15. The load lock chamber of claim 10 wherein the one or more openings of the bottom include one or more slots formed within the bottom.

16. The load lock chamber of claim 10 wherein the bottom includes:

a frame; and

an insert positioned within the frame.

17. The load lock chamber of claim 16 wherein the frame comprises stainless steel and the insert comprises aluminum.

18. The load lock chamber of claim 16 wherein the one or more openings of the bottom are formed within the frame.

19. An apparatus comprising:

a top adapted to coupled to a main body of a load lock chamber, wherein the top includes one or more openings that divide the top into a first portion and a second portion; and

one or more top sealing members adapted to cover each opening of the top, wherein each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top.

20. The apparatus of claim 19 wherein the first portion of the top is adapted to contact a sealing surface wall of the main body of the load lock chamber when the top is coupled to the main body.

21. The apparatus of claim 20 wherein the top includes:

a frame; and

an insert positioned within the frame.

22. An apparatus comprising:

a bottom adapted to coupled to a main body of a load lock chamber, wherein the bottom includes one or more openings that divide the bottom into a first portion and a second portion; and

one or more bottom sealing members adapted to cover each opening of the bottom, wherein each bottom sealing member absorbs a movement of the first portion of the bottom relative to the second portion of the bottom.

23. The apparatus of claim 22 wherein the first portion of the bottom is adapted to contact a sealing surface wall of the main body of the load lock chamber when the bottom is coupled to the main body.

24. The apparatus of claim 23 wherein the bottom includes:

a frame; and

an insert positioned within the frame.

25. A method of sealing a first load lock chamber, comprising:

defining a gap between a central portion of a top and a sealing surface wall of the first load lock chamber so as to reduce movement of the sealing surface wall caused by movement of the central portion of the top; and

sealing the gap with a flexible gap sealing member.

26. The method of claim 25 wherein reducing movement of the sealing surface wall caused by movement of the central portion of the top includes reducing rubbing between a gasket of a load lock door and the sealing surface wall of the load lock chamber when the load lock door is sealed against the sealing surface wall by the gasket.

27. The method of claim 25 wherein:

defining a gap comprises forming a gap that extend through the top; and

sealing the gap comprises using a first sealing member to seal a top surface of the top and using a second sealing member to seal a bottom surface of the top.

28. The method of claim 26 further comprising evacuating a region between the first and second sealing members.

29. A method comprising:

providing a load lock chamber that includes;

a body having;

at least one sealing surface wall including a sealing surface, the sealing surface wall having an opening adjacent the sealing surface adapted to input or output a substrate; and

a plurality of side walls;

a top coupled to the body, wherein the top includes one or more openings that divide the top into a first portion and a second portion; and

one or more top sealing members adapted to cover each opening of the top, wherein each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top;

storing a substrate within the load lock chamber;

transferring the substrate from the load lock chamber to a processing chamber; and

processing the substrate within the processing chamber.

30. The method of claim 29 wherein transferring the substrate from the load lock chamber to the processing chamber includes transferring the substrate from the load lock chamber to a transfer chamber and from the transfer chamber to the processing chamber.

31. The method of claim 29 further comprising transferring the substrate from the processing chamber back to the load lock chamber.

32. The method of claim 31 wherein the substrate is a glass substrate for a flat panel display.

33. The method of claim 31 wherein the substrate is a polymer substrate for a flat panel display.

34. A door for a chamber comprising:

a bellows;

a first stiffener coupled to a first side of the bellows; and

a flexible sealing member coupled to a second side of the bellows and adapted to seal against a sealing surface wall of a chamber opening.

35. The door of claim 34 wherein the bellows comprises an elastomer or a metal.

36. The door of claim 34 wherein the first stiffener comprises aluminum or stainless steel.

37. The door of claim 34 further comprising a second stiffener coupled to the second side of the bellows.

38. The door of claim 37 wherein the second stiffener comprises aluminum or stainless steel.