Lithographic apparatus and device manufacturing method
First Claim
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1. A lithographic apparatus comprising:
- an illumination system that supplies a beam of radiation;
a beam splitter that splits the beam into first and second beams of radiation;
a first array of individually controllable elements that patterns the first beam with a first pattern;
a second array of individually controllable elements that patterns the second beam with a second pattern;
a beam combiner that combines the first and second patterned beams to form a combined patterned beam; and
a system that projects the combined patterned beam onto a target portion of a substrate, wherein a first portion of the combined patterned beam derived from the first patterned beam is substantially linearly polarized, and wherein a second portion of the combined patterned beam derived from the second patterned beam is substantially linearly polarized, substantially orthogonal to the first portion.
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Abstract
Lithographic apparatus providing a patterned beam of radiation in which radiation that is linearly polarized in a first direction has a first pattern and radiation that is linearly polarized in an orthogonal direction has a second pattern.
39 Citations
15 Claims
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1. A lithographic apparatus comprising:
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an illumination system that supplies a beam of radiation;
a beam splitter that splits the beam into first and second beams of radiation;
a first array of individually controllable elements that patterns the first beam with a first pattern;
a second array of individually controllable elements that patterns the second beam with a second pattern;
a beam combiner that combines the first and second patterned beams to form a combined patterned beam; and
a system that projects the combined patterned beam onto a target portion of a substrate, wherein a first portion of the combined patterned beam derived from the first patterned beam is substantially linearly polarized, and wherein a second portion of the combined patterned beam derived from the second patterned beam is substantially linearly polarized, substantially orthogonal to the first portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A lithographic apparatus, comprising:
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an illumination system that supplies a beam of radiation;
a patterning device that patterns the beam;
a system that projects the patterned beam onto a target portion of a substrate, the system comprises a polarizing cube that separates the patterned beam into a first patterned sub-beam having radiation that is substantially linearly polarized in a first direction and second patterned sub-beam having radiation that is substantially linearly polarized in a second direction, which is substantially orthogonal to the first direction;
first and second optical correction units that correct the first and second patterned sub-beams, respectively; and
a beam combiner that combines the first and second corrected sub-beams to form a corrected patterned beam. - View Dependent Claims (11, 12, 13)
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14. A device manufacturing method, comprising:
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(a) splitting a beam of radiation into first and second beams of radiation using a beam splitter;
(d) pattering the first beam of radiation with a first pattern using a first array of individually controllable elements;
(e) pattering the second beam of radiation with a second pattern using a second array of individually controllable elements;
(f) combining the first and second patterned beams to form a combined patterned beam using a beam combiner; and
(g) projecting the combined patterned beam of radiation onto a target portion of a substrate, wherein a first portion of the combined patterned beam derived from the first patterned beam is substantially linearly polarized, wherein a second portion of the combined patterned beam derived from the second patterned beam is substantially linearly polarized, substantially orthogonal to the first portion.
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15. A device manufacturing method comprising:
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(a) patterning a beam of radiation using a patterning device;
(b) projecting the patterned beam onto a target portion of a substrate;
(c) separating the projected patterned beam into a first patterned sub-beam having radiation that is substantially linearly polarized in a first direction using a polarized cube;
(d) separating the projected patterned beam into a second patterned sub-beam having radiation that is substantially linearly polarized in a second direction, substantially orthogonal to the first direction using the polarized cube (e) correcting each of the first and second patterned sub-beams using respective first and second optical correction units; and
(f) combining the first and second corrected sub-beams to form a corrected patterned beam.
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Specification