Micromirror having offset addressing electrode
First Claim
Patent Images
1. a micromirror device, comprising:
- a mirror plate operable to rotate above a substrate and at most one addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is from 5°
to 50°
degrees relative to a line normal to the addressing electrode;
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Abstract
The micromirror device of the present invention comprises a reflective deflectable mirror plate and an addressing electrode provided for deflecting the mirror plate, wherein the addressing electrode is displaced along a direction perpendicular to the length of the hinge such that a portion of the addressing electrode is extended beyond the mirror plate.
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Citations
63 Claims
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1. a micromirror device, comprising:
- a mirror plate operable to rotate above a substrate and at most one addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is from 5°
to 50°
degrees relative to a line normal to the addressing electrode;
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
- a mirror plate operable to rotate above a substrate and at most one addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is from 5°
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26. A spatial light modulator, comprising:
- an array of pixels, each pixel comprising a micromirror, wherein each micromirror comprises a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is 5°
to 50°
degrees relative to the normal of the addressing electrode.
- an array of pixels, each pixel comprising a micromirror, wherein each micromirror comprises a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is 5°
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27. A micromirror device, comprising:
a mirror plate operable to rotate on a substrate and an addressing electrode, wherein the addressing electrode is visible when viewed from directly above the mirror plate with the addressing electrode positioned underneath and offset from the mirror plate. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A spatial light modulator, comprising:
- an array of pixels, each pixel comprising a micromirror that comprises a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the addressing electrode is visible when viewed from directly above the mirror plate with the addressing electrode positioned underneath and offset the mirror plate.
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45. A projection system, comprising;
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an illumination system;
a spatial light modulator having an array of pixels, each pixel having a micromirror that comprises a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the addressing electrode is visible when viewed from directly above the mirror plate with the addressing electrode positioned underneath and offset the mirror plate;
an optical element; and
a display target. - View Dependent Claims (46, 47, 48)
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49. A projection system, comprising:
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an illumination system;
a spatial light modulator having an array of pixels, each pixel having a micromirror that comprises;
a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the mirror plate and the addressing electrode are positioned such that an imaginary line connecting a geometric center of the mirror plate and a geometric center of the addressing electrode is 5°
to 50°
degrees relative to the normal of the addressing electrode;
an optical element; and
a display target. - View Dependent Claims (50, 51, 52)
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53. A spatial light modulator:
- comprising;
an array of pixels, each pixel having a micromirror that has a mirror plate operable to rotate on a substrate, and an addressing electrode for rotating the mirror plate, wherein the addressing electrode is positioned directly underneath at least two mirror plates. - View Dependent Claims (54, 55)
- comprising;
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56. A spatial light modulator, comprising:
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an array of micromirrors, each comprising a deflectable and reflective mirror plate attached to a deformable hinge that is held on a substrate; and
an array of addressing electrodes, each of which is positioned proximate to a mirror plate of the array of micromirrors for addressing and deflecting the mirror plate, wherein the addressing electrode extends beyond the furthest point of the mirror plate at a non-deflected state. - View Dependent Claims (57, 58, 59, 60, 61, 62, 63)
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Specification