Photonic MEMS and structures
First Claim
1. A display device comprising:
- a MEMS display portion; and
a plurality of MEMS switches, at least some of which are coupled to the display, wherein at least some of the plurality of MEMS switches comprise;
first and second terminals;
an electrode, and a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable.
6 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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Citations
18 Claims
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1. A display device comprising:
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a MEMS display portion; and
a plurality of MEMS switches, at least some of which are coupled to the display, wherein at least some of the plurality of MEMS switches comprise;
first and second terminals;
an electrode, and a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A display device comprising:
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a MEMS display portion; and
a plurality of MEMS switches for controlling the display, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate; and
wherein the plurality of MEMS switches forms in part row or column select circuitry, and wherein at least some of the plurality of MEMS switches comprise first and second terminals, an electrode, and a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable. - View Dependent Claims (8, 9)
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10. A MEMS switch comprising:
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first and second terminals;
an electrode, a deflecting arm responsive to a voltage across at least a portion of the arm and the electrode, wherein the first and second terminals are selectively connectable, and a substrate supporting said first and second terminals, said electrode, and said deflecting arm. - View Dependent Claims (11, 12, 13)
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14. A display device comprising:
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a MEMS display portion; and
a plurality of means for switching electrical circuits, at least some of which are coupled to the display. - View Dependent Claims (15, 16, 17, 18)
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Specification