Interferometric modulation of radiation
First Claim
1. A display device comprising:
- a MEMS display portion; and
a plurality of MEMS switches, at least some of which are coupled to the display.
4 Assignments
0 Petitions
Accused Products
Abstract
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
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Citations
14 Claims
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1. A display device comprising:
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a MEMS display portion; and
a plurality of MEMS switches, at least some of which are coupled to the display. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A display device comprising:
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a MEMS display portion; and
a plurality of MEMS switches for controlling the display, wherein the display portion and the plurality of MEMS switches are integrally formed on a single substrate; and
wherein the plurality of MEMS switches forms in part row or column driver circuitry. - View Dependent Claims (8)
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9. A method of making a MEMS display device, the method comprising:
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forming a display portion on a substrate; and
forming a plurality of MEMS switches at least some of which are coupled to the display, wherein the MEMS switches are formed integrally with the display portion on the substrate using at least some common process steps.
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- 10. An electronic circuit comprising a plurality of MEMS switches, wherein said MEMS switches comprise layers of deposited material on an electrically inactive substrate.
Specification