Transport apparatus, control method for the same, and vacuum processing system
First Claim
1. A transport apparatus comprising:
- a housing having an airtight structure;
first, second, and third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft;
permanent magnets arranged at predetermined positions of the first, second, and third driving shafts, respectively;
first, second, and third electromagnetic stators provided in the housing to correspond to the respective permanent magnets;
a driving means configured to supply driving currents to the first, second, and third electromagnetic stators based on predetermined information; and
a movable arm assembly configured to be driven by the first, second, and third driving shafts to transport a predetermined object to be transported.
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Accused Products
Abstract
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.
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Citations
9 Claims
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1. A transport apparatus comprising:
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a housing having an airtight structure;
first, second, and third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft;
permanent magnets arranged at predetermined positions of the first, second, and third driving shafts, respectively;
first, second, and third electromagnetic stators provided in the housing to correspond to the respective permanent magnets;
a driving means configured to supply driving currents to the first, second, and third electromagnetic stators based on predetermined information; and
a movable arm assembly configured to be driven by the first, second, and third driving shafts to transport a predetermined object to be transported. - View Dependent Claims (2, 3, 4, 5)
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6. A method for controlling a transport apparatus, the transport apparatus comprising:
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a housing having an airtight structure;
first, second, and third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft;
permanent magnets arranged at predetermined positions of the first, second, and third driving shafts, respectively;
first, second, and third electromagnetic stators provided in the housing to correspond to the respective permanent magnets;
a driving means configured to supply driving currents to the first, second, and third electromagnetic stators based on predetermined information; and
a movable arm assembly configured to be driven by the first, second, and third driving shafts to transport a predetermined object to be transported, the method comprising the step of rotating the paired arms of each of the first and second link mechanisms around the coaxial rotary shaft in the same direction by the same angle, thereby rotating the first and second transport units around the coaxial rotary shaft. - View Dependent Claims (7, 8)
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9. A vacuum processing system comprising:
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a transport chamber having a transport apparatus, the transport apparatus comprising;
a housing having an airtight structure;
first, second, and third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft;
permanent magnets arranged at predetermined positions of the first, second, and third driving shafts, respectively;
first, second, and third electromagnetic stators provided in the housing to correspond to the respective permanent magnets;
a driving means configured to supply driving currents to the first, second, and third electromagnetic stators based on predetermined information; and
a movable arm assembly configured to be driven by the first, second, and third driving shafts to transport a predetermined object to be transported; and
at least one vacuum processing chamber that is connected with the transport chamber and is configured to receive an object to be processed from the transport apparatus and hand it over to the transport apparatus.
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Specification