Dual-sided capacitor and method of formation
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Accused Products
Abstract
A dual-sided HSG capacitor and a method of fabrication are disclosed. A thin native oxide layer is formed between a doped polycrystalline layer and a layer of hemispherical grained polysilicon (HSG) as part of a dual-sided lower capacitor electrode. Prior to the dielectric formation, the lower capacitor electrode may be optionally annealed to improve capacitance.
18 Citations
83 Claims
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1-50. -50. (canceled)
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51. A memory device comprising:
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an array of memory cells, each memory cell of said array comprising a transistor and a capacitor, said capacitor comprising;
a dual-sided electrode comprising an oxide layer between two conductive layers;
a dielectric layer in contact with said dual-sided electrode; and
a conductive layer over said dielectric layer. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59, 60)
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61. A semiconductor device comprising:
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an electrical circuit formed over a semiconductor substrate, said electrical circuit comprising a capacitor, said capacitor further comprising a dual-sided capacitor electrode comprising;
an annealed doped polycrystalline layer having HSG grains of a first thickness;
a layer of hemispherical grained polysilicon having HSG grains of a second thickness; and
an oxide layer between said annealed doped polycrystalline layer and said layer of hemispherical grained polysilicon. - View Dependent Claims (62, 63, 64, 65, 66, 67)
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68. A processor system comprising:
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a processor; and
a memory coupled to said processor, at least one of said processor and said memory comprising a capacitor, said capacitor comprising;
a dual-sided electrode comprising an oxide layer between two conductive layers;
a dielectric layer in contact with said dual-sided electrode; and
a conductive layer over said dielectric layer. - View Dependent Claims (69, 70, 71, 72, 73, 74)
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75. An electronic system comprising:
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at least one electrical circuit containing a capacitor, said capacitor comprising;
a dual-sided electrode comprising an oxide layer between two conductive layers;
a dielectric layer in contact with said dual-sided electrode; and
a conductive layer over said dielectric layer. - View Dependent Claims (76, 77, 78, 79, 80, 81, 82, 83)
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Specification