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Glass substrate and capacitance-type pressure sensor using the same

  • US 20060001128A1
  • Filed: 06/27/2005
  • Published: 01/05/2006
  • Est. Priority Date: 07/02/2004
  • Status: Active Grant
First Claim
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1. A glass substrate comprising:

  • a glass substrate body that has a pair of main surfaces opposite to each other; and

    island-shaped silicon portions that are buried in the glass substrate such that at least portions thereof are exposed from the pair of main surfaces, respectively.

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