Gratings, related optical devices and systems, and methods of making such gratings
First Claim
Patent Images
1. An article, comprising:
- a first layer comprising a first material and having a surface with a cross-sectional profile comprising a plurality of portions and at least one peak and at least one trough; and
a second layer adjacent the first layer, the second layer comprising a second material and having a surface with a cross-sectional profile comprising a plurality of portions corresponding to the portions of the cross-sectional profile of the surface of the first layer and at least one peak and at least one trough, wherein the corresponding portions have an angular orientation within about 10% or less of each other and a length within about 10% or less of each other, the first and second materials are different and the article is birefringent for a wavelength, λ
, where λ
is in a range from about 150 nm to about 2,000 nm.
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Abstract
Gratings and related devices and systems are disclosed.
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Citations
40 Claims
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1. An article, comprising:
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a first layer comprising a first material and having a surface with a cross-sectional profile comprising a plurality of portions and at least one peak and at least one trough; and
a second layer adjacent the first layer, the second layer comprising a second material and having a surface with a cross-sectional profile comprising a plurality of portions corresponding to the portions of the cross-sectional profile of the surface of the first layer and at least one peak and at least one trough, wherein the corresponding portions have an angular orientation within about 10% or less of each other and a length within about 10% or less of each other, the first and second materials are different and the article is birefringent for a wavelength, λ
, where λ
is in a range from about 150 nm to about 2,000 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An article, comprising
a first layer comprising a first material and having a surface with a periodic cross-sectional profile comprising a plurality of portions; - and
a second layer adjacent the first layer, the second layer comprising a second material and having a surface with a cross-sectional profile comprising a plurality of portions corresponding to the portions of the cross-sectional profile of the surface of the first layer, wherein corresponding portions have an angular orientation within about 10% or less of each other and a length within about 10% or less of each other, the first and second materials are different and a period of the cross-sectional profile of the surface of the first layer is about 2,000 nm or less.
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28. An article, comprising:
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a first layer comprising a first material extending in a plane and comprising a surface having a plurality of facets that are non-normal and non-parallel to the plane, the surface of the first layer having a cross-sectional profile comprising at least one peak and at least one trough; and
a second layer adjacent the first layer, the second layer comprising a second material adjacent and having a perpendicular thickness that is substantially constant, wherein the first and second materials are different and the article is birefringent for a wavelength, λ
, where λ
is in a range from about 150 nm to about 2,000 nm.
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29. An article, comprising:
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a first layer comprising a first material extending in a plane and comprising a surface having a plurality of facets that are non-normal and non-parallel to the plane and having a periodic cross-sectional profile; and
a second layer adjacent the first layer, the second layer comprising a second material and having a perpendicular thickness that is substantially constant, wherein a period of the cross-sectional profile of the surface of the first layer is about 2,000 nm or less.
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30. An article, comprising:
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a plurality of layers each having a surface with saw-tooth cross-sectional profile, wherein the article is birefringent for radiation having a wavelength, λ
, from about 150 nm to about 2,000 nm.
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31. A method, comprising:
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forming a layer of a second material by sequentially depositing a plurality of monolayers of the second material, one of the monolayers of the second material being deposited on a surface of a layer of a first material having a cross-sectional profile comprising a plurality of portions and at least one peak and at least one trough, wherein the layer of the second material comprises a surface with a cross-sectional profile comprising a plurality of portions corresponding to the portions of the cross-sectional profile of the surface of the layer of the first material and at least one peak and at least one trough, the corresponding portions have an angular orientation within about 10% or less of each other and a length within about 10% or less of each other, the first and second materials are different, and the article is birefringent for a wavelength, λ
, where λ
is in a range from about 150 nm to about 2,000 nm. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39)
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40. A method, comprising:
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forming a layer of a second material by sequentially depositing a plurality of monolayers of the second material, one of the monolayers of the second material being deposited on a surface of a layer of a first material having a periodic cross-sectional profile comprising a plurality of portions and having a period of about 2,000 nm or less, wherein the first and second materials are different and the second layer has a surface comprising a plurality of portions each corresponding to a portion of the cross-sectional profile of the surface of the layer of the first material.
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Specification