Monitoring device and monitoring method for vacuum device
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Abstract
A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. Judgment can be made at the time of performing the device maintenance operation and the device repairing operation.
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Citations
21 Claims
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1-9. -9. (canceled)
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10. A method of supporting, monitoring and diagnosing maintenance and troubles related to a measuring device to which accelerated electron beams are applied in a vacuum, comprising the steps of:
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recording and preserving data from operation monitoring sensors during a starting step and a measuring step of the measuring device in real time and synchronously;
comparing and reproducing timing and operation level by overlapping the data with data at the time of initial or normal operation;
selecting probable trouble cause items from pre-stored selection items on troubles and countermeasures against the troubles when a difference which indicates that maintenance is necessary or it is diagnosed that the trouble occurs is detected on data;
inputting the result executing preliminarily prepared confirmed matters for specifying the trouble causes so as to further specify the causes and obtaining the trouble causes; and
supporting the maintenance and diagnosis of the device. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A system for supporting, monitoring and diagnosing maintenance and troubles related to a measuring device to which accelerated electron beams are applied in a vacuum, comprising:
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a recording unit for recording and preserving data from operation monitoring sensors during a starting step and a measuring step of the measuring device in real time and synchronously; and
a processor for comparing and reproducing timing and operation level by overlapping the data with data at the time of initial or normal operation, selecting probable trouble cause items from pre-stored selection items on troubles and countermeasures against the troubles when a difference which indicates that maintenance is necessary or it is diagnosed that the trouble occurs is detected on data, inputting the result executing preliminarily prepared confirmed matters for specifying the trouble causes so as to further specify the causes and obtaining the trouble causes, and supporting the maintenance and diagnosis of the device. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification