Design mechanism for semiconductor fab-wide data warehouse application
First Claim
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1. A method for collecting, storing and accessing semiconductor manufacturing data in a storage entity, the method comprising:
- collecting the semiconductor manufacturing data from at least one process tool;
storing the semiconductor manufacturing data in a first predefined area of the storage entity until the storing of semiconductor manufacturing data in the first predefined area is complete;
accessing subsequently the semiconductor manufacturing data in the first predefined area of the storage entity; and
storing additional semiconductor manufacturing data in a second predefined area of the storage entity after the storing of semiconductor manufacturing data in the first predefined area is complete.
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Abstract
A method and system for collecting, storing and accessing semiconductor manufacturing data in a storage entity are provided. The semiconductor manufacturing data is collected from at least one process tool and stored in a first predefined area of the storage entity until the data storing in the first predefined area is complete, at which time additional semiconductor manufacturing data may be stored in a second predefined area of the storage entity. After the storing of data in the first predefined area is complete, it may be accessed.
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Citations
26 Claims
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1. A method for collecting, storing and accessing semiconductor manufacturing data in a storage entity, the method comprising:
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collecting the semiconductor manufacturing data from at least one process tool;
storing the semiconductor manufacturing data in a first predefined area of the storage entity until the storing of semiconductor manufacturing data in the first predefined area is complete;
accessing subsequently the semiconductor manufacturing data in the first predefined area of the storage entity; and
storing additional semiconductor manufacturing data in a second predefined area of the storage entity after the storing of semiconductor manufacturing data in the first predefined area is complete. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A computer-readable medium having stored thereon sequences of instructions for responding to a request for collecting, storing and accessing semiconductor manufacturing data in a storage entity, the sequence of instructions including instructions for performing the steps of:
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collecting the semiconductor manufacturing data from at least one process tool;
storing the semiconductor manufacturing data in a first predefined area of the storage entity until the storing of semiconductor manufacturing data in the first predefined area is complete;
accessing subsequently the semiconductor manufacturing data in the first predefined area of the storage entity; and
storing additional semiconductor manufacturing data in a second predefined area of the storage entity after the storing of semiconductor manufacturing data in the first predefined area is complete. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A system for collecting, storing and accessing semiconductor manufacturing data from at least one process tool in a storage entity, the system comprising:
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a storage entity having at least two predetermined areas for storing data;
a data collector configured to receive semiconductor manufacturing data from at least one process tool and store the data in the at least two predetermined areas in the storage entity; and
a data inquirer connected to the storage entity to access the semiconductor manufacturing data in each predetermined area in the storage entity after the storing of semiconductor manufacturing data in each predefined area is complete. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification