Device and a process for the calibration of a semiconductor component test system, in particular of a probe card and/or of a semiconductor component test apparatus
First Claim
1. A device for calibration of a probe card and/or of a semi-conductor component test apparatus, comprising:
- a first connection, at which a calibration signal can be applied;
a second connection, configured for connection with the first connection, at which the calibration signal, can be emitted;
a third connection, at which a further calibration signal, can be applied; and
a fourth connection, configured for connection with the third connection, at which the further calibration signal can be emitted.
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Abstract
A device and a process for the calibration of a semi-conductor component test system The invention relates to a process and a device for the calibration of a probe card and/or of a semi-conductor component test apparatus, including a first connection, at which a corresponding signal, in particular a calibration signal can be applied, and a second connection, connected or connectable with the first connection, at which the signal, in particular the calibration signal, can be emitted, and a third connection, at which a corresponding further signal, in particular a calibration signal, can be applied, and a fourth connection, connected or connectable with the third connection, at which the further signal, in particular the calibration signal, can be emitted.
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Citations
16 Claims
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1. A device for calibration of a probe card and/or of a semi-conductor component test apparatus, comprising:
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a first connection, at which a calibration signal can be applied;
a second connection, configured for connection with the first connection, at which the calibration signal, can be emitted;
a third connection, at which a further calibration signal, can be applied; and
a fourth connection, configured for connection with the third connection, at which the further calibration signal can be emitted. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A system, comprising:
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a device for calibration of a probe card and/or of a semi-conductor component test apparatus, comprising;
a first connection, at which a calibration signal can be applied, a second connection, configured for connection with the first connection at which the calibration signal, can be emitted, a third connection, at which a further calibration signal, can be applied, and a fourth connection, configured for connection with the third connection, at which the further calibration signal can be emitted, wherein the device is a wafer and in which the first connection and the second connection, and/or the third connection and the fourth connection are connected via one or several structures created on or in the wafer; and
a probe card. - View Dependent Claims (9)
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10. A process for the calibration of a probe card and/or of a semi-conductor component test apparatus, comprising:
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emitting a calibration signal to a driver channel of a semi-conductor component test apparatus;
feedback of the calibration signal to the semi-conductor component test apparatus via a probe card connected with the driver channel, a device connected thereto, and a comparator channel of the semi-conductor component test apparatus connected with the probe card. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification