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Device and a process for the calibration of a semiconductor component test system, in particular of a probe card and/or of a semiconductor component test apparatus

  • US 20060005089A1
  • Filed: 06/28/2005
  • Published: 01/05/2006
  • Est. Priority Date: 06/29/2004
  • Status: Active Grant
First Claim
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1. A device for calibration of a probe card and/or of a semi-conductor component test apparatus, comprising:

  • a first connection, at which a calibration signal can be applied;

    a second connection, configured for connection with the first connection, at which the calibration signal, can be emitted;

    a third connection, at which a further calibration signal, can be applied; and

    a fourth connection, configured for connection with the third connection, at which the further calibration signal can be emitted.

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