Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization
First Claim
1. A method for processing a sample having a metal thin film provided thereon to generate a polycrystalline film with a substantially uniform orientation, comprising the steps of:
- (a) irradiating at least one portion of the metal thin film with a pulsed laser to completely melt the at least one portion throughout its entire thickness; and
(b) allowing the melted metal thin film to re-solidify after the at least one portion is melted, wherein the grains of the at least one resolidified portion of the metal thin film have the substantially uniform orientation.
1 Assignment
0 Petitions
Accused Products
Abstract
Method and system for generating a metal thin film with a uniform crystalline orientation and a controlled crystalline microstructure are provided. For example, a metal layer is irradicated with a pulsed laser to completely melt the film throughout its entire thickness. The metal layer can then resolidify to form grains with a substantially uniform orientation. The resolidified metal layer can be irradiated with a sequential lateral solidification technique to modify the crystalline microstructure (e.g., create larger grains, single-crystal regions, grain boundary controlled microstructures, etc.) The metal layer can be irradiated by patterning a beam using a mask which includes a first region capable of attenuating the pulsed laser and a second region allowing complete irradiation of sections of the thin film being impinged by the masked laser beam. An inverse dot-patterned mask can be used, the microstructure that may have substantially the same as the geometric pattern as that of the dots of the mask.
100 Citations
32 Claims
-
1. A method for processing a sample having a metal thin film provided thereon to generate a polycrystalline film with a substantially uniform orientation, comprising the steps of:
-
(a) irradiating at least one portion of the metal thin film with a pulsed laser to completely melt the at least one portion throughout its entire thickness; and
(b) allowing the melted metal thin film to re-solidify after the at least one portion is melted, wherein the grains of the at least one resolidified portion of the metal thin film have the substantially uniform orientation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. A system for producing at least one section of a polycrystalline metal film with a substantially uniform orientation, comprising:
-
a logic arrangement which is operable to;
(a) irradiate at least one portion of the at least one portion of the metal thin film to completely melt the at least one portion of the metal thin film throughout its entire thickness, and (b) allow the at least one portion of the melted metal thin film to re-solidify after the at least one is melted, wherein the grains of the at least one portion have the substantially uniform orientation upon the re-solidification. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
-
-
32. A polycrystalline metal film, comprising:
at least one portion which is irradiated to be completely melted throughout its entire thickness, wherein the at least one portion is re-solidified after being melted, and wherein the at least one portion include grains which have a substantially uniform orientation upon the re-solidification of the at least one portion.
Specification