Coated article with ion treated overcoat layer and corresponding method
First Claim
Patent Images
1. A method of making a coated article, the method comprising:
- providing a glass substrate;
forming a layer comprising silver on the glass substrate;
forming a layer comprising silicon nitride on the substrate over the layer comprising silver, wherein the layer comprising silicon nitride is formed on the substrate by at least sputtering a target comprising silicon; and
ion beam treating the layer comprising silicon nitride in a manner so as to cause the layer comprising silicon nitride to be nitrogen graded so that a portion of the layer comprising silicon nitride further from the glass substrate has a higher nitrogen content than does a portion of the layer closer to the glass substrate.
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Abstract
A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. Ion beam treatment is performed on a layer(s) of the coating. For example, an overcoat layer (e.g., of silicon nitride) of a low-E coating may be ion beam treated in a manner so as to cause the ion beam treated layer to include (a) nitrogen-doped Si3N4, and/or (b) nitrogen graded silicon nitride. It has been found that this permits durability of the coated article to be improved.
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Citations
89 Claims
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1. A method of making a coated article, the method comprising:
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providing a glass substrate;
forming a layer comprising silver on the glass substrate;
forming a layer comprising silicon nitride on the substrate over the layer comprising silver, wherein the layer comprising silicon nitride is formed on the substrate by at least sputtering a target comprising silicon; and
ion beam treating the layer comprising silicon nitride in a manner so as to cause the layer comprising silicon nitride to be nitrogen graded so that a portion of the layer comprising silicon nitride further from the glass substrate has a higher nitrogen content than does a portion of the layer closer to the glass substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of making a coated article, the method comprising:
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providing a substrate;
forming a layer comprising silicon nitride on the substrate; and
ion beam treating the layer comprising silicon nitride in a manner so as to cause a portion of the layer comprising silicon nitride further from the substrate to have a higher nitrogen content than does a portion of the layer closer to the substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A method of making a coated article, the method comprising:
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providing a glass substrate;
sputtering a layer comprising silver on the glass substrate;
sputtering a layer comprising silicon nitride on the glass substrate over the layer comprising silver; and
ion beam treating the layer comprising silicon nitride using at least nitrogen ions so that the ion beam treated layer comprising silicon nitride comprises nitrogen-doped Si3N4. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method of making a coated article, the method comprising:
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providing a glass substrate;
ion beam treating a layer comprising silicon nitride using at least nitrogen ions so that the ion beam treated layer comprising silicon nitride comprises nitrogen-doped Si3N4. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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51. A method of making a coated article, the method comprising:
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providing a glass substrate;
forming an IR reflecting layer on the glass substrate;
sputtering a layer comprising silicon nitride on the substrate over the IR reflecting layer;
ion beam treating the layer comprising silicon nitride using at least oxygen ions so as to form a layer comprising silicon oxynitride which is non-uniformly oxided throughout its thickness. - View Dependent Claims (52, 53, 54, 55)
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56. A method of making a coated article which includes a coating supported by a glass substrate, the method comprising:
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providing the glass substrate;
forming an IR reflecting layer on the glass substrate;
forming at least an outermost layer of the coating on the substrate over the IR reflecting layer by using at least a sputtering target;
ion beam treating the outermost layer of the coating in a manner so as to cause a stress of the outermost layer of the coating to be compressive due to the ion beam treating. - View Dependent Claims (57, 58, 59)
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60. A method of making a coated article which includes a coating supported by a glass substrate, the method comprising:
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providing the coating so as to include at least one infrared (IR) reflecting layer sandwiched between at least first and second dielectric layers; and
in providing the coating, ion beam treating at least one layer thereof in a manner so as to cause a tensile stress thereof to be reduced by at least 10% due to the ion beam treating. - View Dependent Claims (61, 62, 63)
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64. A method of making a coated article, the method comprising:
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providing a glass substrate;
forming an IR reflecting layer on the glass substrate; and
providing a layer comprising silicon nitride on the glass substrate, wherein the layer comprising silicon nitride is ion beam treated using an energy of at least about 550 eV per N2+ ion. - View Dependent Claims (65, 66, 67)
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68. A coated article including a coating supported by a glass substrate, the coating comprising:
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a layer comprising silicon nitride located over at least a layer comprising silver;
wherein the layer comprising silicon nitride comprises nitrogen-doped Si3N4. - View Dependent Claims (69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80)
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81. A coated article including a coating supported by a glass substrate, the coating comprising:
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a layer comprising silicon nitride located over at least a layer comprising silver; and
wherein a portion of the layer comprising silicon nitride further from the glass substrate has a higher nitrogen content than does a portion of the layer comprising silicon nitride closer to the glass substrate. - View Dependent Claims (82, 83, 84, 85, 86, 88)
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87. A coated article including a coating supported by a glass substrate, comprising:
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a layer comprising silicon nitride supported by the glass substrate;
wherein a portion of the layer comprising silicon nitride further from the glass substrate has a higher nitrogen content than does a portion of the layer comprising silicon nitride closer to the glass substrate; and
wherein the coated article has a visible transmission of at least about 70% and a sheet resistance (Rs) of less than or equal to about 6 ohms/square.
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89. A coated article including a coating supported by a glass substrate, comprising:
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an IR reflecting layer supported by the glass substrate;
an overcoat layer provided over at least the IR reflecting layer, wherein the overcoat layer is non-uniform with regard to nitrogen content so that a portion of the overcoat layer further from the glass substrate has a higher nitrogen content than does a portion of the overcoat layer closer to the glass substrate; and
wherein the coated article has a visible transmission of at least about 70% and a sheet resistance (Rs) of less than or equal to about 6 ohms/square.
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Specification