Method for wafer bonding (Al, In, Ga)N and Zn(S, Se) for optoelectronic applications
First Claim
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1. A method for wafer bonding, comprising:
- (a) creating a ZnSSe wafer;
(b) planarizing and cleaning the ZnSSe wafer;
(c) creating an AlGaInN wafer;
(d) cleaning the AlGaInN wafer; and
(e) joining the ZnSSe and AlGaInN wafers together and fusing the joined wafers.
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Abstract
A method for producing a wafer bonded structure between (Al, In, Ga)N and Zn(S,Se). A highly reflective and conductive distributed Bragg reflector (DBR) for relatively short optical wave lengths can be fabricated using Zn(S,Se) and MgS/(Zn, Cd)Se materials. Using wafer bonding techniques, these high-quality DBR structures can be combined with a GaN-based optical device structure.
28 Citations
18 Claims
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1. A method for wafer bonding, comprising:
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(a) creating a ZnSSe wafer;
(b) planarizing and cleaning the ZnSSe wafer;
(c) creating an AlGaInN wafer;
(d) cleaning the AlGaInN wafer; and
(e) joining the ZnSSe and AlGaInN wafers together and fusing the joined wafers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification