System and method for integrated data transfer, archiving and purging of semiconductor wafer data
First Claim
1. A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data for use in silicon manufacturing and device fabrication processes, comprising:
- a network;
a data acquisition system capable of acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, the data acquisition system being capable of communicating over the network;
a buffer system for providing temporary storage for scan data transmitted over the network from the data acquisition system and for providing fault tolerance;
a server system for providing storage for the scan data transmitted from the buffer system over the network, the server system converting the scan data into a format used by and stored in a database management system;
an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system being capable of operating as a transfer manager for purging, archiving, restoring, importing and exporting scan data.
1 Assignment
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Accused Products
Abstract
A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; and an analysis system 06 client station including a display and communicating with the server system 04 over the network, the analysis system 06 and the server system 04 managing the purging, archiving, restoring, importing and exporting of scan data.
41 Citations
31 Claims
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1. A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data for use in silicon manufacturing and device fabrication processes, comprising:
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a network;
a data acquisition system capable of acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, the data acquisition system being capable of communicating over the network;
a buffer system for providing temporary storage for scan data transmitted over the network from the data acquisition system and for providing fault tolerance;
a server system for providing storage for the scan data transmitted from the buffer system over the network, the server system converting the scan data into a format used by and stored in a database management system;
an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system being capable of operating as a transfer manager for purging, archiving, restoring, importing and exporting scan data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data for use in silicon manufacturing and device fabrication processes, comprising the steps of:
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communicating over a network;
acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools using a data acquisition system, the data acquisition system being capable of communicating over the network;
providing temporary storage and fault tolerance for scan data transmitted over the network from the data acquisition system by using a buffer system;
providing storage for the scan data transmitted from the buffer system over the network using a server system, the server system converting the scan data into a format used by and stored in a database management system;
analyzing scan data using an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system being capable of managing the purging, archiving, restoring, importing and exporting of scan data. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A software program product implemented on a processor readable medium including instructions performed on a data processor for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data for use in silicon manufacturing and device fabrication processes, the instructions comprising:
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instructions for communicating over a network;
instructions for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools using a data acquisition system, the data acquisition system being capable of communicating over the network;
instructions for providing temporary storage and fault tolerance for scan data transmitted over the network from the data acquisition system by using a buffer system;
instructions for providing storage for the scan data transmitted from the buffer system over the network using a server system, the server system converting the scan data into a format used by and stored in a database management system;
instructions for analyzing scan data using an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system being capable of managing the purging, archiving, restoring, importing and exporting of scan data.
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Specification