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System and method for integrated data transfer, archiving and purging of semiconductor wafer data

  • US 20060009942A1
  • Filed: 07/08/2005
  • Published: 01/12/2006
  • Est. Priority Date: 07/09/2004
  • Status: Active Grant
First Claim
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1. A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data for use in silicon manufacturing and device fabrication processes, comprising:

  • a network;

    a data acquisition system capable of acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, the data acquisition system being capable of communicating over the network;

    a buffer system for providing temporary storage for scan data transmitted over the network from the data acquisition system and for providing fault tolerance;

    a server system for providing storage for the scan data transmitted from the buffer system over the network, the server system converting the scan data into a format used by and stored in a database management system;

    an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system being capable of operating as a transfer manager for purging, archiving, restoring, importing and exporting scan data.

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