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Methods of making magnetic write heads with use of linewidth shrinkage techniques

  • US 20060010684A1
  • Filed: 06/30/2004
  • Published: 01/19/2006
  • Est. Priority Date: 06/30/2004
  • Status: Active Grant
First Claim
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1. A method for use in making a magnetic head, comprising:

  • forming a first pole piece layer of a first pole piece;

    forming a patterned resist over the first pole piece layer;

    electroplating a pedestal over the first pole piece layer within a channel of the patterned resist;

    forming a gap layer over the pedestal within the channel of the patterned resist;

    forming a resist channel shrinking film over the patterned resist;

    baking the resist channel shrinking film to thereby reduce a width of the channel of the patterned resist;

    removing the resist channel shrinking film;

    electroplating a second pole piece within the reduced-width channel of the patterned resist;

    removing the patterned resist; and

    milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes.

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