Methods of making magnetic write heads with use of linewidth shrinkage techniques
First Claim
1. A method for use in making a magnetic head, comprising:
- forming a first pole piece layer of a first pole piece;
forming a patterned resist over the first pole piece layer;
electroplating a pedestal over the first pole piece layer within a channel of the patterned resist;
forming a gap layer over the pedestal within the channel of the patterned resist;
forming a resist channel shrinking film over the patterned resist;
baking the resist channel shrinking film to thereby reduce a width of the channel of the patterned resist;
removing the resist channel shrinking film;
electroplating a second pole piece within the reduced-width channel of the patterned resist;
removing the patterned resist; and
milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes.
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Accused Products
Abstract
A method for use in making a magnetic write head includes the steps of forming a first pole piece layer of a first pole piece; forming a patterned resist over the first pole piece layer; electroplating a pedestal over the first pole piece layer within a channel of the patterned resist; electroplating a metal gap layer over the pedestal within the channel of the patterned resist; forming a resist channel shrinking film over the patterned resist; baking the resist channel shrinking film over the patterned to thereby reduce a width of the channel; removing the resist channel shrinking film; electroplating a second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes. Advantageously, the reduction in channel width using the resist channel shrinking film provides for self-alignment of the second pole piece with the pedestal which can be symmetrically notched for improved overwrite (OW) properties and reduced adjacent track interference (ATI).
17 Citations
30 Claims
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1. A method for use in making a magnetic head, comprising:
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forming a first pole piece layer of a first pole piece;
forming a patterned resist over the first pole piece layer;
electroplating a pedestal over the first pole piece layer within a channel of the patterned resist;
forming a gap layer over the pedestal within the channel of the patterned resist;
forming a resist channel shrinking film over the patterned resist;
baking the resist channel shrinking film to thereby reduce a width of the channel of the patterned resist;
removing the resist channel shrinking film;
electroplating a second pole piece within the reduced-width channel of the patterned resist;
removing the patterned resist; and
milling the pedestal, using the second pole piece as a mask, to form a central notched pedestal having side walls with angled slopes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for use in making a magnetic head, comprising:
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forming, within a channel of a patterned resist, a first pole piece pedestal and gap layer over the first pole piece pedestal;
forming a resist channel shrinking film within the channel of the patterned resist;
baking the resist channel shrinking film over the patterned resist to thereby reduce a width of the channel of the patterned resist;
removing the resist channel shrinking film; and
electroplating a second pole piece within the reduced-width channel of the patterned resist. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method for use in forming an inductive write head, comprising:
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forming, within a channel of a patterned resist, a first pole piece pedestal and gap layer over the first pole piece pedestal;
forming a resist channel shrinking film within the channel of the patterned resist; and
baking the resist channel shrinking film over the patterned resist, to thereby reduce a width of the channel above the gap layer and pedestal. - View Dependent Claims (26, 27, 28, 29, 30)
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Specification