Film bulk acoustic resonator package and method of fabricating same
First Claim
Patent Images
1. A microfabricated device, comprising:
- a first substrate;
a second substrate bonded to said first substrate to define a chamber;
a film bulk acoustic resonator (FBAR) device located on a surface of said first substrate inside said chamber;
a circuit located on a surface of said second substrate inside said chamber; and
an electrical connection between said circuit and said FBAR device.
11 Assignments
0 Petitions
Accused Products
Abstract
A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.
61 Citations
26 Claims
-
1. A microfabricated device, comprising:
-
a first substrate;
a second substrate bonded to said first substrate to define a chamber;
a film bulk acoustic resonator (FBAR) device located on a surface of said first substrate inside said chamber;
a circuit located on a surface of said second substrate inside said chamber; and
an electrical connection between said circuit and said FBAR device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A method for manufacturing a microfabricated device, the method comprising:
-
providing first and second substrates;
forming a film bulk acoustic resonator (FBAR) device on a surface of said first substrate;
forming a circuit on a surface of said second substrate; and
bonding said first and second substrates together to define a chamber in which said FBAR device and said circuit are located;
said bonding establishing an electrical connection between said FBAR device and said circuit. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
Specification