Semiconductor device, designing method thereof, and recording medium storing semicondcutor designing program
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Abstract
A semiconductor device has a via-contact, a main wire having an end connected to the via-contact, and an extension extended in line with the main wire from the end of the main wire beyond the via-contact, the width of the extension being equal to or narrower than the width of the main wire. The extension prevents the end of the main wire from being rounded by an optical proximity effect, eliminates a contact defect or an open defect between the via-contact and the end of the main wire, and involves no widening of the main wire around the via-contact, so that other via-contacts may be arranged in the vicinity of the via-contact in question without violating design rules.
28 Citations
10 Claims
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1-7. -7. (canceled)
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8. A recording medium for storing a program that is used to design a semiconductor device having X (X being a natural number) wiring layers, wherein the program includes the steps of:
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arranging functional blocks and elements in a chip area with the use of an automatic layout tool;
arranging main wires in a layer N (N satisfying 0<
=N<
=X−
1), main wires in a layer N+1, and via-contacts in the layer N with the use of the automatic layout tool, to connect the functional blocks and elements to one another through the main wires and via-contacts; and
arranging extensions that extend in line with the main wires in the layer N and N+1, together with the via-contacts in the layer N, with the use of the automatic layout tool. - View Dependent Claims (9, 10)
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Specification