Integration of photon emission microscope and focused ion beam
First Claim
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1. An integrated FIB/PEM apparatus for conducting failure analysis on an integrated circuit sample, comprising:
- an evacuated chamber having a sample holder therein, said evacuated chamber having a feedthrough therethrough for connecting an electrical stimulus to said sample, and having an electrical connection from said feedthrough for connecting to said sample;
a light source arranged in an optical column, to direct an optical beam onto a sample held in said sample holder, said optical beam having an optical beam axis;
an imaging detector arranged to detect and image photon emission from said sample;
an ion source with associated optics arranged in a FIB column, to direct a focused ion beam onto said sample, said ion beam having an ion beam axis;
a charged particle detector arranged to detect and image charged particles emitted from the interaction of the ion beam and the sample; and
a controller for controlling said focused ion beam to perform circuit modification on said sample.
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Abstract
An integrated FIB/PEM apparatus and method for performing failure analysis on integrated circuits. In-situ failure analysis is enabled by integrating Photon Emission Microscopy into a Focused Ion Beam system, thereby improving throughput and efficiency of Failure Analysis. An iterative method is described for identifying and localizing fault sites on the circuit.
94 Citations
52 Claims
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1. An integrated FIB/PEM apparatus for conducting failure analysis on an integrated circuit sample, comprising:
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an evacuated chamber having a sample holder therein, said evacuated chamber having a feedthrough therethrough for connecting an electrical stimulus to said sample, and having an electrical connection from said feedthrough for connecting to said sample;
a light source arranged in an optical column, to direct an optical beam onto a sample held in said sample holder, said optical beam having an optical beam axis;
an imaging detector arranged to detect and image photon emission from said sample;
an ion source with associated optics arranged in a FIB column, to direct a focused ion beam onto said sample, said ion beam having an ion beam axis;
a charged particle detector arranged to detect and image charged particles emitted from the interaction of the ion beam and the sample; and
a controller for controlling said focused ion beam to perform circuit modification on said sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52)
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Specification