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Integration of photon emission microscope and focused ion beam

  • US 20060012385A1
  • Filed: 11/09/2004
  • Published: 01/19/2006
  • Est. Priority Date: 07/13/2004
  • Status: Active Grant
First Claim
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1. An integrated FIB/PEM apparatus for conducting failure analysis on an integrated circuit sample, comprising:

  • an evacuated chamber having a sample holder therein, said evacuated chamber having a feedthrough therethrough for connecting an electrical stimulus to said sample, and having an electrical connection from said feedthrough for connecting to said sample;

    a light source arranged in an optical column, to direct an optical beam onto a sample held in said sample holder, said optical beam having an optical beam axis;

    an imaging detector arranged to detect and image photon emission from said sample;

    an ion source with associated optics arranged in a FIB column, to direct a focused ion beam onto said sample, said ion beam having an ion beam axis;

    a charged particle detector arranged to detect and image charged particles emitted from the interaction of the ion beam and the sample; and

    a controller for controlling said focused ion beam to perform circuit modification on said sample.

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