Light scanning electron microscope and use
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Accused Products
Abstract
In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.
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Citations
85 Claims
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1-39. -39. (canceled)
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40. Confocal laser scanning electron microscope for the detection of at least one probe region, comprising:
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illuminating means for providing a line-shaped illuminating beam for illuminating a probe in several points or regions in parallel, an illuminating beam path traveled by the illuminating beam, scanning means for guiding the illuminating beam over the probe while scanning and for descanning radiation emitted by the probe, detector means for simultaneously detecting several illuminated probe points lying on a line, and confocal image producing means for producing an at least partially confocal image of the probe from the descanned radiation and imaging it onto the at least one detector, the confocal image producing means including one of a slotted aperture and a slot-shaped region. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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Specification