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Projection objective having a high aperture and a planar end surface

  • US 20060012885A1
  • Filed: 06/14/2005
  • Published: 01/19/2006
  • Est. Priority Date: 12/15/2003
  • Status: Active Grant
First Claim
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23. Projection objective having an image plane and a lens furthest therefrom and starting from which there is a convergent beam path up to the image plane, in which a pupil plane or system aperture is arranged at a distance of at least 10 mm on the image side of said lens.

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