Enhanced PFC waste-gas treating system
First Claim
1. An enhanced PFC waste-gas treating system provided at one side of a waste-gas treating equipment, said system comprises:
- a machine main body, said machine main body is provided exteriorly thereof with a gas inlet and a gas exhausting tube;
said gas inlet is connected with said waste-gas treating equipment;
said gas exhausting tube is connected with a gas drawing pump unit to exhaust gases in said machine main body;
said machine main body is provided therein further with two water collecting tanks, a front-section condensing tube, a catalyst treating unit, a water treating unit and a rear-section condensing tube;
wherein a first water collecting tank is provided with said front-section condensing tube and said catalyst treating unit, a second water collecting tank is provided with said water treating unit and said rear-section condensing tube;
said catalyst treating unit and said water treating unit are connected with each other via a pipeline, said front-section condensing tube is connected with said gas inlet exteriorly of said machine main body, while said rear-section condensing tube is connected with said gas exhausting tube also exteriorly of said machine main body.
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Accused Products
Abstract
The waste-gas treating system is designed for treating the waste gas created in general semiconductor processing in production; the waste-gas treating system mainly is provided at one side of a waste-gas treating equipment, and contains therein mainly a condensing tube, a catalyst treating unit, a water treating unit and water collecting tanks; the catalyst treating unit decomposes toxic gases such as per-fluorine compound (PFC) etc. that are remained in the waste-gas treating equipment and are unable to be dealt with to thereby form non-toxic gases, and does water treating on the byproduct from dissociation, thus a function of lowering temperature can be acquired, then the gases are exhausted to the atmosphere to perform secondarily treating to reduce the content of PFC in the atmosphere and to reduce damage of the hothouse effect.
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Citations
12 Claims
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1. An enhanced PFC waste-gas treating system provided at one side of a waste-gas treating equipment, said system comprises:
a machine main body, said machine main body is provided exteriorly thereof with a gas inlet and a gas exhausting tube;
said gas inlet is connected with said waste-gas treating equipment;
said gas exhausting tube is connected with a gas drawing pump unit to exhaust gases in said machine main body;
said machine main body is provided therein further with two water collecting tanks, a front-section condensing tube, a catalyst treating unit, a water treating unit and a rear-section condensing tube;
wherein a first water collecting tank is provided with said front-section condensing tube and said catalyst treating unit, a second water collecting tank is provided with said water treating unit and said rear-section condensing tube;
said catalyst treating unit and said water treating unit are connected with each other via a pipeline, said front-section condensing tube is connected with said gas inlet exteriorly of said machine main body, while said rear-section condensing tube is connected with said gas exhausting tube also exteriorly of said machine main body.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
Specification