Radiation-curable anti-reflective coating system

• US 20060014101A1
• Filed: 09/12/2005
• Published: 01/19/2006
• Est. Priority Date: 10/31/2001
• Status: Abandoned Application

• Current Assignee: Aylin Vance, Grace Tang, Haixing Zheng, Liu He, Sung-Soon Park
• Original Assignee: Aylin Vance, Grace Tang, Haixing Zheng, Liu He, Sung-Soon Park
• Inventors: Zheng, Haixing, Tang, Grace, He, Liu, Vance, Aylin, Park, Sung-Soon
• Application Number:
  US11/225,317
• Publication Number:
  US 20060014101A1
• Time in Patent Office: Days
• US Class Current: 430/270.100
• CPC Class Codes: G02B 1/111 using layers comprising organic materials
• CPC Class Codes: Y10T 428/31507 Of polycarbonate
• CPC Class Codes: Y10T 428/31612 As silicone, silane or siloxane
• CPC Class Codes: Y10T 428/31645 Next to addition polymer from unsaturated monomers

Abstract

A radiation-curable anti-reflective coating is disclosed. The coating may be deposited on a substrate by spinning, dipping or rolling. The anti-reflective coating may have two layers in which case the anti-reflective coating has a V-shaped reflectance pattern in the visible wavelength spectrum. The anti-reflective coating may have three layers in which case the anti-reflective coating has a broadband reflectance pattern in the visible wavelength spectrum.

Claims

1. A method comprising:

depositing a plurality of layers on a substrate, at least one of which comprises a radiation-curable material; and

curing at least one deposited layer by exposure to a radiation source.

2. The method of claim 1, wherein the plurality of layers comprises at least two layers, and relative to one another, a first layer has a high refractive index and a second layer has a low refractive index.

3. The method of claim 1, wherein the plurality of layers comprises at least three layers, and relative to one another, a first layer has a medium refractive index, a second layer has a high refractive index and a third layer has a low refractive index.

4. The method of claim 1, wherein the radiation source comprises an electron beam.

5. The method of claim 1, wherein the radiation source comprises ultraviolet light.

6. The method of claim 1, wherein depositing a plurality of layers on a substrate comprises one of a spinning process, a dipping process, and a rolling process.

7. The method of claim 1, wherein depositing a plurality of layers comprises depositing a radiation-curable layer of at least one acrylic monomer.

8. The method of claim 7, wherein the radiation-curable layer comprises at least one (meth)acrylate monomer and a silicon compound.