Process for titanium nitride removal
First Claim
1. A process of removing titanium nitride from a surface of a substrate, said process comprising:
- providing a process gas comprising at least one reactant selected from the group consisting of a fluorine-containing substance and a chlorine-containing substance;
enriching the process gas with at least one reactive species of the at least one reactant to form an enriched process gas, wherein the enriching is conducted at a first location;
providing the substrate at a substrate temperature greater than 50°
C., wherein the surface of the substrate is at least partially coated with the titanium nitride; and
contacting the titanium nitride on the surface of the substrate with the enriched process gas to volatilize and remove the titanium nitride from the surface of the substrate, wherein the contacting occurs at a second location differing from the first location.
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Abstract
A process of removing titanium nitride from a surface of a substrate includes: providing a process gas including at least one reactant selected from the group consisting of a fluorine-containing substance and a chlorine-containing substance; enriching the process gas with at least one reactive species of the at least one reactant to form an enriched process gas, wherein the enriching is conducted at a first location; providing the substrate at a substrate temperature greater than 50° C., wherein the surface of the substrate is at least partially coated with the titanium nitride; and contacting the titanium nitride on the surface of the substrate with the enriched process gas to volatilize and remove the titanium nitride from the surface of the substrate, wherein the contacting occurs at a second location differing from the first location.
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Citations
19 Claims
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1. A process of removing titanium nitride from a surface of a substrate, said process comprising:
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providing a process gas comprising at least one reactant selected from the group consisting of a fluorine-containing substance and a chlorine-containing substance;
enriching the process gas with at least one reactive species of the at least one reactant to form an enriched process gas, wherein the enriching is conducted at a first location;
providing the substrate at a substrate temperature greater than 50°
C., wherein the surface of the substrate is at least partially coated with the titanium nitride; and
contacting the titanium nitride on the surface of the substrate with the enriched process gas to volatilize and remove the titanium nitride from the surface of the substrate, wherein the contacting occurs at a second location differing from the first location. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 19)
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16. A process of removing titanium nitride from a surface of a substrate, said process comprising:
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providing a process gas comprising at least one reactant selected from the group consisting of a fluorine-containing substance and a chlorine-containing substance;
enriching the process gas with at least one reactive species of the at least one reactant to form an enriched process gas;
providing the substrate at a substrate temperature from 50°
C. to 900°
C., wherein the surface of the substrate is at least partially coated with the titanium nitride; and
contacting the titanium nitride on the surface of the substrate with the enriched process gas to volatilize and remove the titanium nitride from the surface of the substrate at an etch rate greater than 180 nm/min, wherein the enriched process gas contacting the titanium nitride is substantially free of ions. - View Dependent Claims (17)
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18. A process of removing a coating from a surface of a substrate, said process comprising:
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providing a process gas comprising at least one reactant selected from the group consisting of a fluorine-containing substance and a chlorine-containing substance;
enriching the process gas with at least one reactive species of the at least one reactant to form an enriched process gas, wherein the enriching is conducted at a first location;
providing the substrate at a substrate temperature from 50°
C. to 900°
C.; and
contacting the coating on the surface of the substrate with the enriched process gas to volatilize and remove the coating from the surface of the substrate at an etch rate greater than 180 nm/min, wherein the contacting occurs at a second location differing from the first location, and the coating on the surface of the substrate comprises a binary compound of titanium and nitrogen.
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Specification