Field plate trench transistor
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Accused Products
Abstract
A field plate trench transistor (20-60) has a semiconductor body (3) which contains a plurality of trenches (9) which are isolated from one another by mesa regions. The trenches (9) contain gate electrodes (11) for controlling a vertical flow of current through the semiconductor body (3). At least one portion of the gate electrodes (11) are at source potential.
47 Citations
32 Claims
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1-12. -12. (canceled)
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13. A field plate trench transistor comprising:
a semiconductor body containing a plurality of trenches which are isolated from one another by mesa regions, the trenches containing gate electrodes operable to control a vertical flow of current through the semiconductor body, wherein at least one portion of the gate electrodes is at a potential which differs from the gate potential. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A field plate trench transistor comprising
a) a semiconductor body; -
b) a plurality of trenches contained in the semiconductor body, the plurality of trenches being isolated from one another by mesa regions, wherein the plurality of trenches contain i) first and second gate electrodes operable to control a vertical flow of current through the semiconductor body and ii) field electrodes which underlie the gate electrodes and are at source potential, are at another potential, or are floating; and
wherein the first gate electrodes are insulated from the underlying field electrodes and are at a gate potential, and the second gate electrodes are either electrically insulated from the underlying field electrodes or are connected to the underlying field electrodes and are at a potential which differs from the gate potential. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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Specification