Magnetic bearing control device

• US 20060017340A1
• Filed: 05/17/2005
• Published: 01/26/2006
• Est. Priority Date: 05/17/2004
• Status: Active Grant

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: Kozaki, Junichiro, Ofuji, Masaki
• Granted Patent: US 7,352,553 B2
• Time in Patent Office: Days
• US Class Current: 310/90.500
• CPC Class Codes: F16C 2360/45 Turbo-molecular pumps in general F04D19/04
• CPC Class Codes: F16C 32/0444 Details of devices to control the actuation of the electromagnets

Abstract

A magnetic bearing control device includes a rotation speed sensor for detecting a rotational speed of a rotating member supported on an axial magnetic bearing and a radial magnetic bearing without contact, and a displacement sensor for detecting an axial displacement of the rotating member. A control unit outputs a control signal of the axial magnetic bearing based on a signal from the displacement sensor. A filter unit reduces a signal with a specific frequency from the control signal output from the control unit, and passes a remaining signal, and a driving unit drives the axial magnetic bearing based on the signal output from the filter unit. The filter unit includes several notch filters with different ranges of the specific frequencies, and a selection device for selecting at least one of the notch filters according to the rotational speed.

Claims

1. A magnetic bearing control device for a rotating member supported on an axial magnetic bearing and a radial magnetic bearing without contact, comprising:

a rotation speed sensor for detecting a rotational speed of the rotating member,

a displacement sensor for detecting an axial displacement of the rotating member,

a filter unit for reducing a signal with a specific frequency band from a signal transferred from the displacement sensor and passing a remaining signal, said filter unit having a plurality of notch filters with different specific frequency bands, and a selection device for selecting at least one of the notch filters according to the rotational speed detected by the rotation speed sensor and inputting the signal transferred from the displacement sensor to the at least one of the notch filters selected by the selection device,

a control unit for outputting a control signal of the axial magnetic bearing, said control unit being disposed before or after the filter unit, and

a driving unit for driving the axial magnetic bearing based on the filtered output from the filter unit.

2. A magnetic bearing control device according to claim 1, wherein said selecting device selects more than two notch filters from the plurality of notch filters according to the rotational speed detected by the rotation speed sensor, and connects the more than two notch filters in series to thereby operate as a forming device for forming a group of notch filters, said control signal being input to the more than two notch filters formed by forming device or prepared by signals passing through the notch filters.

3. A magnetic bearing control device according to claim 2, wherein said forming device selects the more than two notch filters in changing the notch filters such that at least one of the more than two notch filters is same before and after the rotational speed detected by the rotational speed sensor is changed.

4. A magnetic bearing control device according to claim 2, wherein said forming device selects the more than two notch filters having different center frequencies of the specific frequency bands so that the center frequencies are located adjacent to each other and specific frequency bands are partially overlapped.

5. A magnetic bearing control device according to claim 3, wherein said forming device selects the more than two notch filters having different center frequencies of the specific frequency bands so that the center frequencies are located adjacent to each other and specific frequency bands are partially overlapped.

6. A magnetic bearing control device according to claim 1, wherein said plurality of notch filters includes the specific frequency bands different from and partially overlapping with each other.

7. A magnetic bearing control device according to claim 1, wherein said control unit is disposed between the displacement sensor and the filter unit or between the filter unit and the driving unit.