Stage apparatus and camera shake correction apparatus using the stage apparatus
First Claim
1. A stage apparatus comprising:
- a Y-direction deformable body including a stationary support member, a movable support member and a pair of X-direction leaf springs to form a substantially rectangular shape in a free state; and
an X-direction deformable body, positioned in said Y-direction deformable body, including a connecting member, a support member and a pair of Y-direction leaf springs to form a substantially rectangular shape in a free state;
wherein said stationary support member and said movable support member of the Y-direction deformable body and a pair of said Y-direction leaf springs of the X-direction deformable body extend in a specific Y-direction, said stationary support member being fixed to a stationary body;
wherein a pair of said X-direction leaf springs of the Y-direction deformable body and said connecting member and said support member of the X-direction deformable body extend in an X-direction perpendicular to said Y-direction;
wherein said support member of said X-direction deformable body includes a support member joint portion which joins said support member to said movable support member of said Y-direction deformable body, and wherein said X-direction deformable body and said Y-direction deformable body are integrally molded by synthetic resin together with said support member joint portion.
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0 Petitions
Accused Products
Abstract
A stage apparatus includes a Y-direction deformable body including a stationary support member, a movable support member and a pair of X-direction leaf springs to form a substantially rectangular shape in a free state; and an X-direction deformable body, positioned in the Y-direction deformable body, including a connecting member, a support member and a pair of Y-direction leaf springs to form a substantially rectangular shape in a free state. The support member of the X-direction deformable body includes a support member joint portion which joins the support member to the movable support member of the Y-direction deformable body. The X-direction deformable body and the Y-direction deformable body are integrally molded by synthetic resin together with the support member joint portion.
65 Citations
33 Claims
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1. A stage apparatus comprising:
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a Y-direction deformable body including a stationary support member, a movable support member and a pair of X-direction leaf springs to form a substantially rectangular shape in a free state; and
an X-direction deformable body, positioned in said Y-direction deformable body, including a connecting member, a support member and a pair of Y-direction leaf springs to form a substantially rectangular shape in a free state;
wherein said stationary support member and said movable support member of the Y-direction deformable body and a pair of said Y-direction leaf springs of the X-direction deformable body extend in a specific Y-direction, said stationary support member being fixed to a stationary body;
wherein a pair of said X-direction leaf springs of the Y-direction deformable body and said connecting member and said support member of the X-direction deformable body extend in an X-direction perpendicular to said Y-direction;
wherein said support member of said X-direction deformable body includes a support member joint portion which joins said support member to said movable support member of said Y-direction deformable body, and wherein said X-direction deformable body and said Y-direction deformable body are integrally molded by synthetic resin together with said support member joint portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 27, 28, 29, 30, 31, 32, 33)
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18. A stage apparatus comprising:
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a Y-direction deformable body including a stationary support member, a movable support member and a pair of X-direction leaf springs to form a substantially rectangular shape in a free state; and
an X-direction deformable body, positioned in said Y-direction deformable body, including a connecting member, a support member and a pair of Y-direction leaf springs to form a substantially rectangular shape in a free state;
wherein said stationary support member and said movable support member of the Y-direction deformable body and a pair of said Y-direction leaf springs of the X-direction deformable body extend in a specific Y-direction, said stationary support member being fixed to a stationary body;
wherein a pair of said X-direction leaf springs of the Y-direction deformable body and said connecting member and said support member of the X-direction deformable body extend in an X-direction perpendicular to said Y-direction;
wherein at least one pair of said pair of X-direction leaf springs and said pair of Y-direction leaf springs are made of metal;
wherein said support member of said X-direction deformable body includes a support member joint portion which joins said support member to said movable support member of said Y-direction deformable body, and wherein said X-direction deformable body and said Y-direction deformable body, except said at least one pair of said pair of X-direction leaf springs and said pair of Y-direction leaf springs which are made of metal, are integrally molded by synthetic resin together with said support member joint portion. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26)
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Specification