Hinge structure of micromirror device
First Claim
1. A hinge structure, comprising:
- a rotatable plate member;
a frame member;
a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis so that the rotatable plate member rotates about the rotation axis with respect to the frame member, wherein the spring member includes;
a first axial section;
a second axial section, an end of the first axial section being connected to the frame member, an end of the second axial section being connected to the rotatable plate member, a predetermined gap being formed between another end of the first axial section and another end of the second axial section;
a first zigzag section and a second zigzag section formed on opposite sides with respect to the rotation axis, each of the first and second zigzag sections including parallel portions which are parallel with each other and with the rotation axis and bent portions each connecting adjacent parallel portions, the bent portions being arranged in a direction perpendicular to the rotation axis, an end of the first zigzag section being connected to the other end of the first axial section, an end of the second zigzag section being connected to the other end of the second axial section, and the other end of the first zigzag section being connected to the other end of the second zigzag section.
1 Assignment
0 Petitions
Accused Products
Abstract
A hinge structure includes a rotatable plate member, a frame member, a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis. The spring member includes a first axial section, a second axial section. An end of the first axial section is connected to the frame member, and an end of the second axial section is connected to the rotatable plate member. The spring member includes a first zigzag section and a second zigzag section formed on opposite sides with respect to the rotation axis, each of the first and second zigzag sections including parallel portions which are parallel with each other and with the rotation axis and bent portions each connecting adjacent parallel portions. A predetermined gap between the first and second axial section is smaller than a length of the parallel portions.
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Citations
20 Claims
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1. A hinge structure, comprising:
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a rotatable plate member;
a frame member;
a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis so that the rotatable plate member rotates about the rotation axis with respect to the frame member, wherein the spring member includes;
a first axial section;
a second axial section, an end of the first axial section being connected to the frame member, an end of the second axial section being connected to the rotatable plate member, a predetermined gap being formed between another end of the first axial section and another end of the second axial section;
a first zigzag section and a second zigzag section formed on opposite sides with respect to the rotation axis, each of the first and second zigzag sections including parallel portions which are parallel with each other and with the rotation axis and bent portions each connecting adjacent parallel portions, the bent portions being arranged in a direction perpendicular to the rotation axis, an end of the first zigzag section being connected to the other end of the first axial section, an end of the second zigzag section being connected to the other end of the second axial section, and the other end of the first zigzag section being connected to the other end of the second zigzag section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A hinge structure, comprising:
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a rotatable plate member;
a frame member, a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis so that the rotatable plate member rotates about the rotation axis with respect to the frame member, wherein the spring member includes;
a first axial section;
a second axial section, an end of the first axial section being connected to the frame member, an end of the second axial section being connected to the rotatable plate member, a predetermined gap being formed between another end of the first axial section and another end of the second axial section;
a first zigzag section and a second zigzag section arranged on both sides of the first axial section, respectively; and
a third zigzag section and a fourth zigzag section arranged on both sides of the second axial section, respectively, wherein each of the first, second, third and fourth zigzag sections includes a plurality of parallel portions which are parallel with each other and with the rotation axis, and bent portions each connecting adjacent parallel portions, the bent portions being arranged in a direction perpendicular to the rotation axis, an end of the first zigzag section being connected to the other end of the first axial section, another end of the first zigzag section being connected to an end of the second zigzag section, another end of the second zigzag section being connected to an end of the third zigzag section, another end of the third zigzag section being connected to an end of the fourth zigzag section, and another end of the fourth zigzag section being connected to the other end of the second axial section. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A hinge structure, comprising:
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a rotatable plate member;
a frame member;
a spring member that connects the rotatable plate member with the frame member at each of two opposite positions along a rotation axis so that the rotatable plate member rotates about the rotation axis with respect to the frame member, wherein the spring member includes;
a first axial section;
a second axial section, an end of the first axial section being connected to the frame member, an end of the second axial section being connected to the rotatable plate member, a predetermined gap being formed between another end of the first axial section and another end of the second axial section;
a plurality of zigzag sections successively connected between the first axial section and the second axial section, one end of the plurality of successively connected zigzag sections being connected to the other end of the first axial section, another end of the plurality of successively connected zigzag sections being connected to another end of the second axial section, each of the plurality of zigzag sections includes a plurality of parallel portions which are parallel with the rotation axis, the plurality of zigzag sections being formed and arranged point symmetrically with respect to a center of the hinge structure. - View Dependent Claims (18, 19, 20)
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Specification