Thin-film battery devices and apparatus for making the same
First Claim
1. A thin-film, rechargeable battery device, comprising:
- a substrate;
a seed layer adjacent to the substrate;
a first film on the seed layer;
an electrolyte second film adjacent to the first film; and
a third film adjacent to the electrolyte second film.
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
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Citations
25 Claims
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1. A thin-film, rechargeable battery device, comprising:
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a substrate;
a seed layer adjacent to the substrate;
a first film on the seed layer;
an electrolyte second film adjacent to the first film; and
a third film adjacent to the electrolyte second film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A thin-film, rechargeable battery device, comprising:
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a substrate;
means for seeding growth of a crystaline structure adjacent to the substrate;
a first film on the means for assisting growth of a crystaline structure;
an electrolyte second film adjacent to the first film; and
a third film adjacent to the electrolyte second film - View Dependent Claims (16, 17, 18, 19, 20)
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21. An apparatus for making a thin-film rechargable battery device that includes
a substrate, a seed layer adjacent to the substrate, a first film on the seed layer, an electrolyte second film adjacent to the first film, and a third film adjacent to the electrolyte second film, the apparatus comprising: -
a source to receive the substrate;
means for forming the seed layer on the substrate;
a deposition station, coupled to the source to receive the substrate, configured to deposit the first film on the substrate, the station including;
(a) means for depositing a first material to a location on the substrate, and (b) means for supplying an energized second material different than the first material towards the substrate adjacent the location to control growth of the first material at the location;
a deposition station that deposits an electrolyte second film on the first film; and
a deposition station that deposits a third film on the second film. - View Dependent Claims (22, 23, 24, 25)
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Specification