Method of controlling the film properties of a CVD-deposited silicon nitride film
First Claim
1. A method of PECVD depositing an a-SiNx:
- H film, said method comprising;
depositing said a-SiNx;
H dielectric film over a substrate which is at a temperature within the range of about 250°
C. to about 450°
C.;
depositing said a-SiNx;
H dielectric film at a process pressure within the range of about 0.5 Torr to about 3 Torr;
depositing said a-SiNx;
H dielectric film from a precursor gas composition including N2, NH3, SiH4, and H2, wherein H2 is provided to said process chamber H is provided to the deposition chamber in an amount such that a component ratio of NH3;
H2 in said plasma precursor gas composition ranges from about 1;
2 to about 3;
1; and
applying a plasma to a mixture of said precursors, so that the plasma density in a process chamber in which said a-SiNx;
H dielectric film is deposited is within the range of about 0.1 W/cm2 to about 1 W/cm2.
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Accused Products
Abstract
We have discovered that adding H2 to a precursor gas composition including SiH4, NH3, and N2 is effective at improving the wet etch rate and the wet etch rate uniformity across the substrate surface of a-SiNx:H films which are deposited on a substrate by PECVD. Wet etch rate is an indication of film density. Typically, the lower the wet etch rate, the denser the film. The addition of H2 to the SiH4/NH3/N2 precursor gas composition did not significantly increase the variation in deposited film thickness across the surface of the substrate. The a-SiNx:H films described herein are particularly useful as TFT gate dielectrics in the production of flat panel displays. The uniformity of the film across the substrate enables the production of flat panel displays having surface areas of 25,000 cm2 and larger.
403 Citations
20 Claims
-
1. A method of PECVD depositing an a-SiNx:
- H film, said method comprising;
depositing said a-SiNx;
H dielectric film over a substrate which is at a temperature within the range of about 250°
C. to about 450°
C.;
depositing said a-SiNx;
H dielectric film at a process pressure within the range of about 0.5 Torr to about 3 Torr;
depositing said a-SiNx;
H dielectric film from a precursor gas composition including N2, NH3, SiH4, and H2, wherein H2 is provided to said process chamber H is provided to the deposition chamber in an amount such that a component ratio of NH3;
H2 in said plasma precursor gas composition ranges from about 1;
2 to about 3;
1; and
applying a plasma to a mixture of said precursors, so that the plasma density in a process chamber in which said a-SiNx;
H dielectric film is deposited is within the range of about 0.1 W/cm2 to about 1 W/cm2. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
- H film, said method comprising;
-
20. A PECVD apparatus which includes instructions for depositing an a-SiNx:
- H film according to a method comprising;
depositing said a-SiNx;
H dielectric film over a substrate which is at a temperature within the range of about 250°
C. to about 450°
C.;
depositing said a-SiNx;
H dielectric film at a process pressure within the range of about 0.5 Torr to about 3 Torr;
depositing said a-SiNx;
H dielectric film from a precursor gas composition including N2, NH3, SiH4, and H2, wherein H2 is provided to said process chamber H2 is provided to the deposition chamber in an amount such that a component ratio of NH3;
H2 in said plasma precursor gas composition ranges from about 1;
2 to about 3;
1; and
applying a plasma to a mixture of said precursors, so that the plasma density in a process chamber in which said a-SiNx;
H dielectric film is deposited is within the range of about 0.1 W/cm2 to about 1 W/cm2.
- H film according to a method comprising;
Specification