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Multiaxial monolithic acceleration sensor

  • US 20060021436A1
  • Filed: 06/10/2003
  • Published: 02/02/2006
  • Est. Priority Date: 06/11/2002
  • Status: Abandoned Application
First Claim
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1. Tri-axial monolithic acceleration sensor (1), which comprises the following characteristic features:

  • a) the acceleration sensor (1) consists of plural individual sensors (2a-d) with respectively a main sensitivity axis (11) arranged on a common substrate (8), b) each individual sensor (2a-d) is rotatably movably suspended on two torsion spring elements (4a-h) and comprises a seismic mass (3a-d) with a center of gravity (Sa, Sb, Sc and Sd), c) each individual sensor (2a-d) comprises means for the measurement (10) of the deflection of the seismic mass (3a-d), characterized in that d) the acceleration sensor (1) consists of at least three identical individual sensors (2a-d), e) each individual sensor (2a-d) is suspended eccentrically relative to its center of gravity (Sa, Sb, Sc, Sd) and f) is rotated relative to the other individual sensors (2a-d) by 90°

    , 180°

    or 270°

    .

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