Multiaxial monolithic acceleration sensor
First Claim
1. Tri-axial monolithic acceleration sensor (1), which comprises the following characteristic features:
- a) the acceleration sensor (1) consists of plural individual sensors (2a-d) with respectively a main sensitivity axis (11) arranged on a common substrate (8), b) each individual sensor (2a-d) is rotatably movably suspended on two torsion spring elements (4a-h) and comprises a seismic mass (3a-d) with a center of gravity (Sa, Sb, Sc and Sd), c) each individual sensor (2a-d) comprises means for the measurement (10) of the deflection of the seismic mass (3a-d), characterized in that d) the acceleration sensor (1) consists of at least three identical individual sensors (2a-d), e) each individual sensor (2a-d) is suspended eccentrically relative to its center of gravity (Sa, Sb, Sc, Sd) and f) is rotated relative to the other individual sensors (2a-d) by 90°
, 180°
or 270°
.
1 Assignment
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Accused Products
Abstract
A multi-axial monolithic acceleration sensor has the following features. The acceleration sensor consists of plural individual sensors with respectively a main sensitivity axis arranged on a common substrate. Each individual sensor is rotatably moveably suspended on two torsion spring elements and has a seismic mass with a center of gravity. Each individual sensor has components that measure the deflection of the seismic mass. The acceleration sensor preferably consists of at least three identical individual sensors. Each individual sensor is suspended eccentrically relative to its center of gravity and is rotated by 90°, 180° or 270° relative to the other individual sensors.
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Citations
16 Claims
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1. Tri-axial monolithic acceleration sensor (1), which comprises the following characteristic features:
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a) the acceleration sensor (1) consists of plural individual sensors (2a-d) with respectively a main sensitivity axis (11) arranged on a common substrate (8), b) each individual sensor (2a-d) is rotatably movably suspended on two torsion spring elements (4a-h) and comprises a seismic mass (3a-d) with a center of gravity (Sa, Sb, Sc and Sd), c) each individual sensor (2a-d) comprises means for the measurement (10) of the deflection of the seismic mass (3a-d), characterized in that d) the acceleration sensor (1) consists of at least three identical individual sensors (2a-d), e) each individual sensor (2a-d) is suspended eccentrically relative to its center of gravity (Sa, Sb, Sc, Sd) and f) is rotated relative to the other individual sensors (2a-d) by 90°
, 180°
or 270°
. - View Dependent Claims (2, 8, 9, 10, 11)
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3-7. -7. (canceled)
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12. Bi-axial monolithic acceleration sensor (1), that comprises the following characteristic features:
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a) the acceleration sensor (1) consists of two individual sensors (2a-d) with respectively a main sensitivity axis (11) arranged on a common substrate (8), b) each individual sensor (2a-d) is rotatably movably suspended on two torsion spring elements (4a-h) and comprises a seismic mass (3a-d) with a center of gravity (Sa, Sb, Sc and Sd), c) each individual sensor (2a-d) comprises means for the measurement (10) of the deflection of the seismic mass (3a-d), characterized in that d) the acceleration sensor (1) consists of two identical individual sensors (2a-d), e) each individual sensor (2a-d) is suspended eccentrically relative to its center of gravity (Sa, Sb, Sc, Sd) and is rotated by 180°
relative to the other individual sensor (2a-d) andf) the main sensitivity axis (11) of the one individual sensor (2a-d) extends vertically to the substrate (8) and the main sensitivity axis (11) of the other individual sensor (2a-d) extends vertically to the substrate (8). - View Dependent Claims (13, 14, 15, 16)
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Specification