Probe card
First Claim
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1. A probe card comprising:
- a probe card substrate;
a multi-layer structure interconnection substrate connected to said probe card substrate;
a plurality of probe needles extending from said multi-layer structure interconnection substrate; and
at least one power supply plane provided between said multi-layer structure interconnection substrate and extreme ends of said probe needles, wherein said power supply plane is configured and arranged to be exchangeable.
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Abstract
A probe card is commonly used for a plurality of kinds of semiconductor chips. The probe card has a probe card substrate and a multi-layer structure interconnection substrate connected to the probe card substrate. A plurality of probe needles extend from the multi-layer structure interconnection substrate. At least one power supply plane is provided between the multi-layer structure interconnection substrate and extreme ends of the probe needles. The power supply plane is configured and arranged to be exchangeable with a different plane.
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Citations
14 Claims
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1. A probe card comprising:
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a probe card substrate;
a multi-layer structure interconnection substrate connected to said probe card substrate;
a plurality of probe needles extending from said multi-layer structure interconnection substrate; and
at least one power supply plane provided between said multi-layer structure interconnection substrate and extreme ends of said probe needles, wherein said power supply plane is configured and arranged to be exchangeable. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A probe card comprising:
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a probe card substrate;
a plurality of probe needles extending from said probe card substrate; and
at least one power supply plane provided between said probe card substrate and extreme ends of said probe needles, wherein said power supply plane is configured and arranged to be exchangeable. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method of testing a semiconductor chip using a probe card comprising a probe card substrate, a multi-layer structure interconnection substrate and a plurality of probe needles, the method comprising:
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placing at least one power supply plane between said multi-player structure interconnection substrate and extreme ends of said probe needles, said power supply plane being provided with contact pads being located in an arrangement corresponding to an arrangement of power supply pads of said semiconductor chip;
contacting said probe needles with electrode pads of said semiconductor chip; and
performing a test on said semiconductor chip.
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14. A method of testing a semiconductor chip using a probe card comprising a probe card substrate and a plurality of probe needles, the method comprising:
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placing at least one power supply plane between said probe card and extreme ends of said probe needles, said power supply plane being provided with contact pads being located in an arrangement corresponding to an arrangement of power supply pads of said semiconductor chip;
contacting said probe needles with electrode pads of said semiconductor chip; and
performing a test on said semiconductor chip.
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Specification