Large substrate test system

• US 20060022694A1
• Filed: 07/29/2004
• Published: 02/02/2006
• Est. Priority Date: 07/29/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kurita, Shinichi, Blonigan, Wendell T., Brunner, Matthias, Kehrberg, Edgar
• Granted Patent: US 7,075,323 B2
• Time in Patent Office: Days
• US Class Current: 324/750.160
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: H01J 2237/204 Means for introducing and/or outputting objects locks H01J2237/184
• CPC Class Codes: H01J 37/185 Means for transferring objects between different enclosures of different pressure or atmosphere

Abstract

A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

Claims

1. A system for testing one or more large substrates, comprising:

a testing chamber having a substrate table disposed therein, the substrate table being adapted to move a substrate within the testing chamber in linear directions, the substrate table, comprising;

a first stage movable in a first direction; and

a second stage movable in a second direction,

wherein the first and second directions are substantially orthogonal;

a load lock chamber at least partially disposed below the testing chamber; and

a transfer chamber coupled to the load lock chamber and the testing chamber, the transfer chamber having a robot disposed therein adapted to transfer substrates between the load lock chamber and the testing chamber.

2. The method of claim 1, further comprising one or more electron beam testing devices disposed on an upper surface of the testing chamber.

3. The system of claim 1, wherein the first stage and the second stage are adapted to move linearly along a horizontal plane.

4. The method of claim 1, wherein the first stage moves the second stage in the first direction.

5. The system of claim 1, wherein the substrate table further comprises a support stage disposed on an upper surface of the second stage.

6. The system of claim 5, wherein the first stage moves both the second stage and the support stage in the first direction.

7. The system of claim 5, wherein the second stage moves the support stage in the second direction.

8. The method of claim 5, wherein the second stage, the support stage, or both move in both the first and second directions.

9. The system of claim 1, wherein the load lock chamber comprises a substrate support having at least two support trays.

10. The system of claim 9, wherein the at least two support trays each comprise a plurality of support pins disposed on an upper surface thereof.

11. The system of claim 2, wherein the one or more electron beam testing devices comprises four devices disposed above the substrate table.

12. The system of claim 1, wherein the robot comprises one or more end effectors, each having one or more fingers for supporting a substrate thereon.

13. The system of claim 12, wherein the one or more end effectors move in the first direction.

14. The system of claim 12, wherein the support stage is segmented to receive the one or more fingers of the end effector.

15. The system of claim 1, wherein the robot comprises two end effectors, one arranged on top of the other, each end effector having two or more fingers spaced apart for supporting a substrate thereon.

16. The system of claim 15, wherein the two end effectors move in the first direction.

17. The system of claim 1, wherein the robot comprises one or more lift mechanisms to vertically move the robot within the transfer chamber.

18. A system for testing a large substrate, comprising:

a testing chamber having a substrate table disposed on a vertically movable pedestal assembly, the substrate table, comprising;

a first stage movable in a first direction;

a second stage movable in a second direction,

wherein the first and second directions are substantially orthogonal;

a load lock chamber disposed adjacent the testing chamber; and

one or more test devices disposed on an upper surface of the testing chamber.

19. The system of claim 18, wherein the first and second stages are adapted to move linearly.

20. The system of claim 18, wherein the substrate table further comprises a third stage having an upper surface adapted to support a substrate thereon.

21. The system of claim 20, further comprising an end effector disposed on an upper surface of the third stage, the end effector adapted to transfer a substrate between the load lock chamber and the substrate table.

22. The system of claim 21, wherein the end effector is extendable into the load lock chamber to transfer substrates between the load lock chamber and the testing chamber.

23. The system of claim 18, wherein the load lock chamber comprises a substrate support having at least two support trays.

24. The system of claim 23, wherein the at least two support trays each comprise a plurality of support pins disposed on an upper surface thereof.

25. A method for testing one or more substrates within an integrated electron beam test assembly, comprising:

loading a substrate to be tested into a testing chamber having a substrate table disposed therein, the substrate table being capable of moving the substrate within the testing chamber, the substrate table, comprising;

a first stage movable in a first direction;

a second stage movable in a second direction, wherein the first and second directions are substantially orthogonal; and

testing the substrate using one or more electronic test devices disposed on an upper surface of the testing chamber, wherein each of the first and second stages move in an X direction or Y direction or both X and Y directions to position the substrate below the one or more electronic test devices.

26. The method of claim 25, wherein the one or more electronic test devices comprises electron beam testing devices.

27. The method of claim 25, wherein the one or more electronic test devices comprises four electron beam testing devices.

28. A method for testing one or more substrates within an integrated electron beam test assembly, comprising:

loading a substrate to be tested into a testing chamber having a substrate table disposed on a vertically movable pedestal assembly, the substrate table, comprising;

a first stage movable in a first direction;

a second stage movable in a second direction;

a third stage having an upper surface adapted to support the substrate thereon; and

an end effector disposed on an upper surface of the third stage, wherein

the first and second directions are substantially orthogonal;

elevating the substrate table by the pedestal assembly to position the substrate in a testing position prior to testing the substrate;

testing the substrate using one or more electronic test devices disposed on en upper surface of the testing chamber, wherein the first and second stages move in an X direction or Y direction or both X and Y directions to position the substrate below the one or more electronic test devices;

lowering the substrate table to an elevation of a load lock chamber disposed adjacent a first side of the testing chamber;

extending the end effector into the load lock chamber;

loading the substrate into the load lock chamber; and

retracting the end effector.

29. The method of claim 28, wherein the one or more electronic test devices comprises electron beam testing devices.

30. The method of claim 28, wherein the one or more electronic test devices comprises four electron beam testing devices.