SYSTEM FOR CONTROLLING THE SUBLIMATION OF REACTANTS
First Claim
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1. A method of producing a vapor from a solid precursor for processing a substrate, comprising:
- placing solid units of precursor into a vessel;
interspersing a thermally conductive material with the units of precursor;
forming a vapor through applying heat energy to both the thermally conductive material and the solid units of precursor; and
routing the vapor from the vessel to a reaction chamber.
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Abstract
Abstract of the Disclosure
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.
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Citations
43 Claims
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1. A method of producing a vapor from a solid precursor for processing a substrate, comprising:
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placing solid units of precursor into a vessel; interspersing a thermally conductive material with the units of precursor;
forming a vapor through applying heat energy to both the thermally conductive material and the solid units of precursor; androuting the vapor from the vessel to a reaction chamber. - View Dependent Claims (2, 3, 4)
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5. A substrate processing system for forming a vapor from a solid precursor by distributing heat to the precursor, comprising:
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a vessel configured to hold units of solid precursor; and a plurality of thermally conductive elements interspersed with the units of solid precursor. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 42, 43)
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30. A substrate processing system for forming a vapor from a solid precursor comprising:
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a vessel configured to hold units of solid precursor; and a microwave generator adjacent to the vessel, the generator being configured to transmit heat energy in the form of microwave energy to effectuate the heating of the precursor. - View Dependent Claims (31, 32, 33)
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34. A mixture for producing a vapor used in substrate processing comprising:
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a batch of precursor for producing a substrate processing vapor; and a plurality of heat transmitting solid forms interspersed through the batch of precursor, the plurality of heat transmitting solid forms collectively increasing the thermal conductivity of the batch of precursor. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41)
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Specification