Characterization of materials with optically shaped acoustic waveforms

• US 20060027021A1
• Filed: 07/21/2005
• Published: 02/09/2006
• Est. Priority Date: 07/23/2004
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Nelson, Keith A., Yamaguchi, Masashi, Paxton, Benjamin, Feurer, Thomas, Choi, Jaime D.
• Granted Patent: US 7,387,027 B2
• Time in Patent Office: Days
• US Class Current: 73/579
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01H 17/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups see provisionally also G01H1/00
• CPC Class Codes: G01N 2291/018 Impedance
• CPC Class Codes: G01N 2291/0231 Composite or layered materials
• CPC Class Codes: G01N 2291/02827 Elastic parameters, strength or force
• CPC Class Codes: G01N 2291/0421 Longitudinal waves
• CPC Class Codes: G01N 29/07 by measuring propagation velocity or propagation time of acoustic waves
• CPC Class Codes: G01N 29/11 by measuring attenuation of acoustic waves
• CPC Class Codes: G01N 29/2418 using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046
• CPC Class Codes: G01N 29/343 pulse waves, e.g. particular sequence of pulses, bursts
• CPC Class Codes: G10K 15/046 using optical excitation, e.g. laser bundle

Abstract

A method for characterizing one or more properties of a sample using acoustic waveforms is disclosed, and comprises directing a sequence of at least three optical pulses to the sample to generate an acoustic response in the sample at a frequency corresponding to the pulse sequence, varying the timing of one or more of the pulses in the sequence to vary the frequency of the acoustic response in the sample, and measuring the strength of the acoustic response as a function of the varied frequency to determine information about the sample.

Claims

1. A method comprising:

directing a sequence of at least three optical pulses to a sample to generate an acoustic response in the sample at a frequency corresponding to the pulse sequence;

varying the timing of one or more of the pulses in the sequence relative to one or more other pulses in the sequence to vary the frequency of the acoustic response in the sample; and

measuring the strength of the acoustic response as a function of the varied frequency to determine information about the sample.

2. The method of claim 1, wherein the pulse sequence comprises at least four optical pulses.

3. The method of claim 1, wherein the pulses in the pulse sequence are equally spaced in time from one another.

4. The method of claim 3, wherein the frequency corresponding to the pulse sequence is the inverse of the equally spaced timing between the pulses.

5. The method of claim 1, wherein the pulses in the pulse sequence are not all equally spaced in time from one another.

6. The method of claim 5, wherein the frequency corresponding to the pulse sequence is a frequency of a peak in a frequency transform of the time-varying intensity of the pulse sequence.

7. The method of claim 1, wherein the optical pulses comprises electromagnetic radiation in at least one of the ultraviolet, visible, and infrared spectral regions.

8. The method of claim 1, wherein the frequencies of the acoustic response are in the range of about 2 to 2000 GHz.

9. The method of claim 8, wherein the frequencies of the acoustic response are in the range of about 5 to 500 GHz.

10. The method of claim 1, wherein each of the optical pulses has a pulse width less than about 1 psec.

11. The method of claim 1, wherein varying the timing of one or more of the pulses in the sequence comprises varying the timing between each pair of consecutive pulses in the pulse sequence.

12. The method of claim 11, wherein the pulses in the pulse sequence define a repetition rate, and wherein varying the timing between each pair of pulses in the pulse sequence comprises varying the repetition rate.

13. The method of claim 1, further comprising generating the pulse sequence by directing a beam comprising at least one optical pulse to make three or more passes to a partially reflective interface configured to transmit a first portion of the pulse and reflect a second portion of the pulse.

14. The method of claim 13, wherein the partially reflective interface is part of a recirculating cavity.

15. The method of claim 14, wherein varying the timing of one or more of the pulses in the sequence comprises moving one or more of the optics in the recirculating cavity relative to one or more other optics in the recirculating cavity.

16. The method of claim 13, wherein the beam makes four or more passes to the partially reflective interface.

17. The method of claim 1, further comprising generating the pulse sequence by filtering spatially dispersed spectral components of an input waveform and recombining the filtered spectral components to form an output waveform comprising the pulse sequence.

18. The method of claim 1, wherein the pulses in the sequence contact the sample at different angles.

19. The method of claim 1, wherein measuring the strength of the acoustic response comprises directing an optical probe beam to the sample to interact with the acoustic response.

20. The method of claim 19, wherein measuring the strength of the acoustic response further comprises monitoring a change in a property of the probe beam caused by its interaction with the acoustic response in the sample.

21. The method of claim 20, wherein the change in the property of the probe beam is monitored interferometrically.

22. The method of claim 20, wherein the monitored property of the probe beam is phase, intensity, direction, or spectral content.

23. The method of claim 19, wherein the optical probe beam comprises one or more optical pulses.

24. The method of claim 1, wherein the information about the sample comprises one or more resonance frequencies of the sample.

25. The method of claim 1, wherein the sample comprises a film, and wherein the information about the sample comprises a film thickness.

26. The method of claim 1, wherein the information about the sample comprises information about at least one of:

a thickness of a layer in the sample, a sound velocity in the sample, an acoustic impedance mismatch between layers in the sample, and delamination of layers in the sample.

27. The method of claim 23, wherein the optical probe beam comprises a sequence of pulses defining a frequency substantially equal to that of the pulse sequence used to generate the acoustic response in the sample.

28. A system comprising:

an optical excitation source configured to direct a sequence of at least three optical pulses to a sample to generate an acoustic response in the sample at a frequency corresponding to the pulse sequence, the optical excitation source further configured to vary the timing of one or more of the pulses in the sequence to vary the frequency of the acoustic response in the sample;

an optical detection system configured to measure the strength of the acoustic response as a function of the varied frequency; and

an electronic processor coupled to the optical detection system and configured to determine information about the sample based on the measured strength of the acoustic response as a function of the varied frequency.