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Methods and apparatus for providing a floating seal for chamber doors

  • US 20060028596A1
  • Filed: 08/01/2005
  • Published: 02/09/2006
  • Est. Priority Date: 06/02/2004
  • Status: Active Grant
First Claim
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1. A method comprising:

  • isolating a sealing surface from a chamber wall of a chamber; and

    sealing the chamber between the sealing surface and the chamber wall.

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