Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

• US 20060028703A1
• Filed: 10/06/2005
• Published: 02/09/2006
• Est. Priority Date: 07/30/2003
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Govil, Pradeep K., Guzman, Andrew
• Granted Patent: US 7,372,614 B2
• Time in Patent Office: Days
• US Class Current: 359/224.100
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

Claims

1. A method comprising:

detecting wavefront aberrations;

generating a control signal based on the detected aberration;

moving extensions of a integrated circuit piezoelectric actuator based on the control signal; and

deforming a reflector based on the moving of the extensions to correct the aberrations in the wavefront.

2. The method of claim 1, wherein the moving and deforming steps compensate for higher order values of the aberrations.

3. The method of claim 1, further comprising generating a Zernike polynomial from the detecting step, wherein the moving and deforming steps correct for aberrations corresponding to all orders of the Zernike polynomial.