Polarizer device for generating a defined spatial distribution of polarization states
First Claim
1. A polarizer device for converting an entry light beam into an exit light beam with a defined spatial distribution of polarization states, comprising:
- an angle varying input device for receiving the entry light beam and for generating a first light beam with a predeterminable first angular distribution of light rays;
an angle-selectively active polarization influencing device for receiving the first light beam and for converting the first light beam into a second light beam according to a defined angle function of the polarization state variation; and
an angle varying output device for receiving the second light beam and for generating the exit light beam with a second angular distribution from the second light beam.
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Accused Products
Abstract
A polarizer device, for converting an entry light beam into an exit light beam with a defined spatial distribution of polarization states, has an angle varying input device for receiving the entry light beam and for generating a first light beam with a predeterminable first angular distribution of light rays; an angle-selectively active polarization influencing device for receiving the first light beam and for converting the first light beam into a second light beam according to a defined angle function of the polarization state variation; and an angle varying output device for receiving the second light beam and for generating the exit light beam with a second angular distribution from the second light beam. In particular, polarization states with a radial or tangential polarization can be provided cost-effectively in this way.
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Citations
50 Claims
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1. A polarizer device for converting an entry light beam into an exit light beam with a defined spatial distribution of polarization states, comprising:
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an angle varying input device for receiving the entry light beam and for generating a first light beam with a predeterminable first angular distribution of light rays;
an angle-selectively active polarization influencing device for receiving the first light beam and for converting the first light beam into a second light beam according to a defined angle function of the polarization state variation; and
an angle varying output device for receiving the second light beam and for generating the exit light beam with a second angular distribution from the second light beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. An illumination system for a microlithography projection exposure apparatus for illuminating an illumination field with the light from a primary light source, comprising:
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a pupil shaping unit for receiving light from the primary light source and for generating a two-dimensional intensity distribution in a pupil shaping surface of the illumination system;
an angle varying input device for receiving an entry light beam coming from the pupil shaping surface and for generating a first light beam with a predeterminable first angular distribution of light rays;
an angle-selectively active polarization influencing device for receiving the first light beam and for converting the first light beam into a second light beam according to a defined angle function of the polarization state variation; and
an angle varying output device for receiving the second light beam and for generating an exit light beam traveling to the illumination field with a second angular distribution from the second light beam. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50)
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Specification