Optical system for spatially controlling light polarization and method for manufacturing the same
First Claim
Patent Images
1. An optical system, comprising:
- a light source for generating a light beam of a designated wavelength;
a target object on which the light beam generated from the light source is irradiated;
a beam shaper in an optical path between the light source and the target object, the beam shaper splitting the light beam into a plurality of partial beams; and
a polarization controller in the optical path between the light source and the target object, the polarization controller controlling the polarization states of the plurality of partial beams.
1 Assignment
0 Petitions
Accused Products
Abstract
An optical system for spatially controlling light polarization, and method for manufacturing the same, includes a light source for generating a light beam of a designated wavelength, a beam shaper for splitting the light beam generated from the light source into a plurality of partial beams, and a polarization controller controlling the polarization states of the partial beams. The polarization controller may be formed on the beam shaper or separate from the beam shaper.
35 Citations
23 Claims
-
1. An optical system, comprising:
-
a light source for generating a light beam of a designated wavelength;
a target object on which the light beam generated from the light source is irradiated;
a beam shaper in an optical path between the light source and the target object, the beam shaper splitting the light beam into a plurality of partial beams; and
a polarization controller in the optical path between the light source and the target object, the polarization controller controlling the polarization states of the plurality of partial beams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A method for forming an optical system, comprising:
-
creating a beam shaper for splitting a light beam of a designated wavelength generated from a light source into at least one partial beam; and
creating a polarizer for controlling the polarization states of the at least one partial beam. - View Dependent Claims (19, 20, 21, 22)
-
-
23. A method for manufacturing a semiconductor device, the method comprising:
-
generating a light beam of a designated wavelength;
splitting the light beam into a plurality of partial beams having different polarization states from each other; and
exposing a photoresist layer coated on a semiconductor substrate using the plurality of partial light beams having the different polarization states from each other.
-
Specification