Vapor deposited functional organic coatings
First Claim
1. A method of depositing an organic coating on a substrate from a vapor phase organic-comprising precursor, wherein said substrate surface upon which said organic coating is applied is a halogenated surface which was produced by treatment of said substrate with a vaporous, halogen-containing compound in a process chamber under vacuum conditions, and wherein said organic-comprising precursor contains at least one nucleophilic functional group which reacts with said halogenated surface to attach an organic coating to said surface.
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Abstract
We have developed an improved vapor-phase deposition method and apparatus for the application of organic films/coatings containing a variety of functional groups on substrates. Most substrates can be coated using the method of the invention. The substrate surface is halogenated using a vaporous halogen-containing compound, followed by a reaction with at least one organic molecule containing at least one nucleophilic functional group capable of reacting with a halogenated substrate surface. The halogenation of the substrate surface and the subsequent reaction with the organic molecule nucleophilic functional group are carried out in the same process chamber in a manner such that the halogenated substrate surface does not lose its functionality prior to reaction with the nucleophilic functional group(s) on the organic molecule. Typically the process chamber is operated under a pressure ranging from about 1 mTorr to about 10 Torr.
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Citations
25 Claims
- 1. A method of depositing an organic coating on a substrate from a vapor phase organic-comprising precursor, wherein said substrate surface upon which said organic coating is applied is a halogenated surface which was produced by treatment of said substrate with a vaporous, halogen-containing compound in a process chamber under vacuum conditions, and wherein said organic-comprising precursor contains at least one nucleophilic functional group which reacts with said halogenated surface to attach an organic coating to said surface.
- 19. A method of attaching an organic coating to a surface of a substrate at a controlled density upon said substrate, wherein said organic coating is formed by reacting a vapor phase organic-comprising precursor containing at least one nucleophilic functional group with a halogen species attached to said substrate surface, and wherein said halogen species are attached to said substrate by treatment of said substrate with a vaporous, halogen-containing compound.
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