Sorting a group of integrated circuit devices for those devices requiring special testing

• US 20060030963A1
• Filed: 09/29/2005
• Published: 02/09/2006
• Est. Priority Date: 02/17/1997
• Status: Active Grant

• Current Assignee: Raymond J. Beffa
• Original Assignee: Raymond J. Beffa
• Inventors: Beffa, Raymond J.
• Granted Patent: US 7,117,063 B2
• Time in Patent Office: Days
• US Class Current: 700/116
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: G01R 31/31718 Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis mechanical aspects G01R31/2808, G01R31/2851
• CPC Class Codes: G01R 31/319 Tester hardware, i.e. output processing circuits
• CPC Class Codes: G06F 11/006 Identification G06F11/2289 takes precedence
• CPC Class Codes: H01L 21/67271 Sorting devices
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 2223/5444 for electrical read out

Abstract

A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing includes storing fabrication deviation data, probe data, and test data in association with the fuse ID of each of the devices indicating each of the devices requires either enhanced reliability testing or standard testing. The fuse ID of each of the devices is then automatically read before, during, or after standard testing of the devices. The testing process requirement data stored in association with the fuse ID of each of the devices is then accessed, and the devices are sorted in accordance with the accessed data into those devices requiring enhanced reliability testing and those requiring standard testing.

Claims

1. A method for determining the fabrication process for a plurality of inspected integrated circuit devices for grouping a first plurality of inspected integrated circuit devices to complete a first process and for grouping a second plurality of inspected integrated circuit devices to complete a second process different than the first process comprising:

storing data in association using an individual identification code of each of the plurality of inspected integrated circuit devices indicating each portion of the fabrication process the plurality of inspected integrated circuit devices have completed, the data including at least one portion of the fabrication process associated with the individual identification code of at least some of the plurality of inspected integrated circuit devices;

reading the individual identification code of each of the plurality of inspected integrated circuit devices;

accessing the data stored in association with the individual identification code of each of the plurality of inspected integrated circuit devices; and

grouping the plurality of inspected integrated circuit devices in accordance with the accessed data into those of the plurality of inspected integrated circuit devices to complete the first process and those of the plurality of integrated circuit devices to complete the second process.

2. The method of claim 1, wherein storing data comprises storing data indicating one or more semiconductor wafers having inspected integrated circuit devices of the plurality of inspected integrated circuit devices have been subjected to an undesired process.

3. The method of claim 1, wherein storing data comprises storing data indicating one or more semiconductor wafers having inspected integrated circuit devices of the plurality of inspected integrated circuit devices have relatively low yields.

4. The method of claim 1, wherein storing data comprises storing data indicating one or more semiconductor wafer lots having inspected integrated circuit devices of the plurality of inspected integrated circuit devices have relatively low yields.

5. The method of claim 1, wherein the plurality of inspected integrated circuit devices come from a plurality of die locations on each of a plurality of semiconductor wafers, and wherein storing data comprises storing data indicating that inspected integrated circuit devices from identical die locations on each of a series of the plurality of semiconductor wafers have relatively low yields.

6. The method of claim 1, wherein the plurality of inspected integrated circuit devices come from a plurality of semiconductor wafers each fabricated on one of a plurality of pieces of fabrication equipment, and wherein storing data comprises storing data indicating that a series of the plurality of semiconductor wafers fabricated using a same piece of fabrication equipment has relatively low yields.

7. The method of claim 1, wherein the plurality of inspected integrated circuit devices come from a plurality of semiconductor wafers each tested on one of a plurality of pieces of test equipment, and wherein storing data comprises storing data indicating that a group of the plurality of semiconductor wafers tested using a same piece of test equipment has relatively low yields.

8. The method of claim 1, wherein the first process and the second process comprise respective standard and special testing processes, and wherein storing data comprises storing special test data indicating that inspected integrated circuit devices of the plurality of inspected integrated circuit devices previously indicated to require the special testing process instead require the standard testing process.

9. The method of claim 1, wherein storing data in association with the individual identification code of each of the plurality of inspected integrated circuit devices comprises storing data in association with the individual identification code of one or more inspected integrated circuit devices other than those inspected integrated circuit devices that are in the plurality of inspected integrated circuit devices to be grouped, the other inspected integrated circuit devices being at a different point in an integrated circuit manufacturing process than the inspected integrated circuit devices in the plurality of inspected integrated circuit devices to be grouped.

10. The method of claim 1, wherein reading the individual identification code of each of the plurality of inspected integrated circuit devices comprises electrically retrieving a unique fuse identification programmed into each of the plurality of inspected integrated circuit devices.

11. The method of claim 1, wherein reading the individual identification code of each of the plurality of inspected integrated circuit devices comprises optically reading a unique identification code provided on each of the plurality of inspected integrated circuit devices.

12. The method of claim 11, wherein optically reading the unique identification code provided on each of the plurality of inspected integrated circuit devices comprises optically reading a unique laser fuse identification programmed into each of the plurality of inspected integrated circuit devices.

13. The method of claim 1, wherein grouping the plurality of inspected integrated circuit devices in accordance with the accessed data into those inspected integrated circuit devices to undergo the first process and those inspected integrated circuit devices to undergo the second process comprises sorting the plurality of inspected integrated circuit devices before a standard testing process into those inspected integrated circuit devices requiring an enhanced reliability testing process and those inspected integrated circuit devices requiring the standard testing process.

14. The method of claim 1, wherein grouping the plurality of inspected integrated circuit devices in accordance with the accessed data into those inspected integrated circuit devices to undergo the first process and those inspected integrated circuit devices to undergo the second process comprises sorting the plurality of inspected integrated circuit devices during a standard testing process into those inspected integrated circuit devices requiring an enhanced reliability testing process and those inspected integrated circuit devices requiring the standard testing process.

15. The method of claim 1, wherein grouping the plurality of inspected integrated circuit devices in accordance with the accessed data into those inspected integrated circuit devices to undergo the first process and those inspected integrated circuit devices to undergo the second process comprises sorting the plurality of inspected integrated circuit devices after a standard testing process into those inspected integrated circuit devices requiring an enhanced reliability testing process and those inspected integrated circuit devices finished with testing.

16. The method of claim 1, wherein accessing the data comprises accessing one of fabrication equipment data, fabrication personnel data, fabrication set-up data, time and date data, yield data, and test data.

17. The method of claim 1, wherein each of the plurality of inspected integrated circuit devices has an associated lot identification, and wherein accessing the data comprises accessing data associated with the lot identification of an inspected integrated circuit device that is associated with each of the read identification codes.

18. A method of classifying a plurality of inspected integrated circuit devices for grouping a first plurality of inspected integrated circuit devices of a type having an identification code into a group of inspected integrated circuit devices to undergo a first process and for grouping a second plurality of inspected integrated circuit devices to undergo a second process comprising:

storing data in association with an individual identification code of each of the plurality of inspected integrated circuit devices indicating each of the plurality of inspected integrated circuit devices undergoes one of the first process and the second process, the data including one or more of fabrication deviation data, probe data, standard test data, special test data, and enhanced reliability testing data associated with the individual identification code of at least some of the plurality of inspected integrated circuit devices;

reading the individual identification code of each of the plurality of inspected integrated circuit devices;

accessing the data stored in association with the individual identification code of each of the plurality of inspected integrated circuit devices; and

grouping the plurality of inspected integrated circuit devices in accordance with the accessed data into those of the plurality of inspected integrated circuit devices to undergo the first process and those of the plurality of integrated circuit devices to undergo the second process.