Acoustic wave sensor with reduced condensation and recovery time
First Claim
1. An acoustic wave sensor apparatus, comprising:
- a piezoelectric substrate having a surface thereon;
at least one interdigital transducer and a passivation layer formed upon said piezoelectric substrate; and
an absorbent material formed upon said passivation layer, wherein said at least on interdigital transducer responds to a plurality of acoustic waves propagating across said surface of said piezoelectric substrate, that provide data indicative of humidity in a vicinity of said piezoelectric substrate, said passivation layer and said at least on interdigital transducer.
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Abstract
An acoustic wave sensor apparatus is disclosed, which generally includes a piezoelectric substrate having a surface thereon. One or more interdigital transducers and a passivation layer can be formed upon the piezoelectric substrate. Additionally, an absorbent material can be formed upon the acoustic path (IDTs, electrodes, etc), such that the interdigital transducers respond to a plurality of acoustic waves propagating across the surface of the piezoelectric substrate, thereby providing data indicative of humidity in the vicinity of the piezoelectric substrate, along with the passivation layer and the interdigital transducers. Additionally, one or more heaters can be formed upon a side of the piezoelectric substrate opposite the side of the piezoelectric substrate upon which the interdigital transducers, the passivation and the absorbent material are located. The heater can be preferably configured from a material such as platinum.
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Citations
20 Claims
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1. An acoustic wave sensor apparatus, comprising:
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a piezoelectric substrate having a surface thereon;
at least one interdigital transducer and a passivation layer formed upon said piezoelectric substrate; and
an absorbent material formed upon said passivation layer, wherein said at least on interdigital transducer responds to a plurality of acoustic waves propagating across said surface of said piezoelectric substrate, that provide data indicative of humidity in a vicinity of said piezoelectric substrate, said passivation layer and said at least on interdigital transducer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An acoustic wave sensor apparatus, comprising:
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a piezoelectric substrate having a surface thereon;
at least one interdigital transducer and a passivation layer formed upon said piezoelectric substrate;
an absorbent material formed upon said passivation layer, wherein said at least on interdigital transducer responds to a plurality of acoustic waves propagating across said surface of said piezoelectric substrate, that provide data indicative of humidity in a vicinity of said piezoelectric substrate, said passivation layer and said at least on interdigital transducer;
at least one heater formed upon a side of said piezoelectric substrate opposite a side upon which said at least one interdigital transducer, said passivation and said absorbent material are located; and
a plurality of oscillators associated with said at least one interdigital transducer, wherein each sensing components of said plurality of sensing components is located in a feedback loop with an oscillator of said plurality of oscillators to thereby provide a multiple mode acoustic wave sensor that provides multiple mode frequency outputs thereof, wherein said at least one multiple mode acoustical vibration amplitude is controlled by said plurality of oscillators. - View Dependent Claims (14, 15, 16)
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17. A method for acoustic wave sensing, comprising the steps of:
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providing a piezoelectric substrate having a surface thereon;
forming at least one interdigital transducer and a passivation layer upon said piezoelectric substrate; and
configuring an absorbent material upon said passivation layer, wherein said at least on interdigital transducer responds to a plurality of acoustic waves propagating across said surface of said piezoelectric substrate, that provide data indicative of humidity in a vicinity of said piezoelectric substrate, said passivation layer and said at least on interdigital transducer. - View Dependent Claims (18, 19, 20)
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Specification