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Micro-electro-mechanical sensor with force feedback loop

  • US 20060032309A1
  • Filed: 08/02/2005
  • Published: 02/16/2006
  • Est. Priority Date: 08/03/2004
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical sensor, comprising:

  • a microstructure having a mass movable with respect to a rest position, according to a predetermined degree of freedom; and

    a displacement-detecting means for detecting a displacement of said mass according to said degree of freedom, said displacement-detecting means including a force feedback loop supplying electrostatic forces tending to restore said mass into said rest position in response to the displacement of said mass according to said degree of freedom, said force feedback loop being an analog feedback loop.

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