Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package
First Claim
1. A micro-electromechanical structure comprising:
- a rotor having a centroidal axis and including a suspended structure which carries mobile electrodes, said suspended structure being connected to a rotor-anchoring region via elastic elements; and
a stator including fixed electrodes facing said mobile electrodes, said stator further including at least one stator element, carrying a plurality of said fixed electrodes, said stator element being fixed to a stator-anchoring region; and
wherein one of said rotor-anchoring regions and stator-anchoring regions extends along said centroidal axis and at least another of said rotor-anchoring regions and stator-anchoring regions extends near said centroidal axis.
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Accused Products
Abstract
In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region via elastic elements. The stator includes at least one stator element, which carries a plurality of fixed electrodes and is fixed to a stator-anchoring region. One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis.
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Citations
30 Claims
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1. A micro-electromechanical structure comprising:
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a rotor having a centroidal axis and including a suspended structure which carries mobile electrodes, said suspended structure being connected to a rotor-anchoring region via elastic elements; and
a stator including fixed electrodes facing said mobile electrodes, said stator further including at least one stator element, carrying a plurality of said fixed electrodes, said stator element being fixed to a stator-anchoring region; and
wherein one of said rotor-anchoring regions and stator-anchoring regions extends along said centroidal axis and at least another of said rotor-anchoring regions and stator-anchoring regions extends near said centroidal axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A micro-electromechanical device, comprising:
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a semiconductor material substrate including a central anchoring region;
a rotor anchor coupled to the substrate at the central anchoring region;
a stator anchor coupled to the substrate at the central anchoring region;
a rotor lying in a spaced-apart relationship with respect to a surface of the substrate and movably coupled to the substrate by a plurality of spring elements extending between the rotor and the rotor anchor, the rotor element being sized and positioned to surround the rotor and stator anchors; and
a stator lying in a spaced-apart relationship with respect to a surface of the substrate and coupled to the substrate by the stator anchor. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A device comprising:
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a semiconductor substrate;
a rotor anchor coupled to the substrate;
a rotor movably coupled to the rotor anchor and having a plurality of rotor electrodes;
a plurality of stator anchors coupled to the substrate substantially equidistant from the rotor anchor;
a stator coupled to the plurality of stator anchors and having a plurality of stator electrodes; and
means for reducing sensitivity of the device to dilatation thereof. - View Dependent Claims (28, 29, 30)
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Specification