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Acoustic wave sensor apparatus, method and system using wide bandgap materials

  • US 20060032312A1
  • Filed: 11/16/2004
  • Published: 02/16/2006
  • Est. Priority Date: 04/17/2002
  • Status: Abandoned Application
First Claim
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1. An acoustic wave sensor to detect an analyte, comprising:

  • a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.

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