Acoustic wave sensor apparatus, method and system using wide bandgap materials
First Claim
Patent Images
1. An acoustic wave sensor to detect an analyte, comprising:
- a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.
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Abstract
An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.
59 Citations
99 Claims
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1. An acoustic wave sensor to detect an analyte, comprising:
a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 43, 44, 45, 46, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99)
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27. (canceled)
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38-42. -42. (canceled)
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47-48. -48. (canceled)
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49. A method for operating an acoustic wave sensor, the method comprising:
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generating an acoustic wave;
directing the acoustic wave to transverse a micro-machined arrangement;
detecting a resonating frequency of the micro-machined arrangement; and
determining a presence of an analyte based on the detected resonating frequency, wherein the analyte contains a target structure that binds to an immobilization layer of the micro-machined arrangement. - View Dependent Claims (50, 51, 52, 53)
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54-71. -71. (canceled)
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72. A method for operating an acoustic wave sensor, the method comprising:
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generating an acoustic wave;
directing the acoustic wave to transverse a resonating arrangement including a wide bandgap material grown using plasma source molecular beam epitaxy;
detecting a resonating frequency of the resonating arrangement; and
determining a presence of an analyte based on the detected resonating frequency, wherein the analyte contains a target structure that binds to an immobilization layer of the resonating arrangement.
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88. (canceled)
Specification